Seung-Ki Chae
28Patents
6h-index
82Co-inventors
68Inventor score
Filing activity: Jun 7, 1995 → Nov 4, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6039770A | Semiconductor device manufacturing system having means for reducing a pressure difference between loadlock and processing chambers | Chemistry; Metallurgy | 23 | Expired |
| US6869500B2 | Method for processing a wafer and apparatus for performing the same | Electricity | 21 | Expired |
| US7556712B2 | Laser cleaning of backside of wafer for photolithographic processing | Electricity | 18 | Active |
| US6910954B2 | Method of supplying slurry and a slurry supply apparatus having a mixing unit at a point of use | Performing Operations; Transporting | 15 | Expired |
| US5833425A | Semiconductor device manufacturing apparatus employing vacuum system | Emerging Cross-Sectional Technologies | 11 | Expired |
| US7951653B1 | Methods of manufacturing a semiconductor device using compositions for etching copper | Electricity | 9 | Active |
| US7497963B2 | Etching method | Electricity | 6 | Expired |
| US6071350A | Semiconductor device manufacturing apparatus employing vacuum system | Emerging Cross-Sectional Technologies | 6 | Expired |
| US7335601B2 | Method of processing an object and method of controlling processing apparatus to prevent contamination of the object | Electricity | 6 | Expired |
| US7880138B2 | Apparatus and method for analyzing contaminants on wafer | Physics | 4 | Active |
| US5654205A | Apparatus and method for depositing particles onto a wafer | Electricity | 4 | Expired |
| US6814835B2 | Apparatus and method for supplying chemicals in chemical mechanical polishing systems | Emerging Cross-Sectional Technologies | 3 | Expired |
| US8455359B2 | Semiconductor devices and methods of manufacturing the same | Electricity | 3 | Active |
| US7985297B2 | Method of cleaning a quartz part | Chemistry; Metallurgy | 2 | Active |
| US8361274B2 | Etching apparatus and etching method | Electricity | 2 | Expired |
| US5746832A | Apparatus for depositing particles onto a wafer | Electricity | 2 | Expired |
| US7170070B2 | Ion implanters having an arc chamber that affects ion current density | Electricity | 1 | Expired |
| US7417709B2 | Method and apparatus for exposing semiconductor substrates | Physics | 1 | Active |
| US8083507B2 | Vacuum pump having rotation body cleaning unit with spraying holes on an output surface of the cleaning body surrounding a shaft | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US6602323B2 | Method and apparatus for reducing PFC emission during semiconductor manufacture | Emerging Cross-Sectional Technologies | 1 | Expired |
| US7112810B2 | Ion implanting apparatus and ion implanting method using the same | Electricity | 1 | Expired |
| US7879736B2 | Composition for etching silicon oxide and method of forming a contact hole using the same | Electricity | 1 | Active |
| US7040336B2 | Gas delivery system for supplying gas to semiconductor manufacturing equipment | Emerging Cross-Sectional Technologies | 1 | Expired |
| US7232552B2 | Apparatus for decomposing perfluorinated compounds and system for processing perfluorinated compounds using the apparatus | Emerging Cross-Sectional Technologies | 0 | Expired |
| US7608540B2 | Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.