Inventor · Sunnyvale, CA, US

Soonam Park

77Patents
24h-index
78Co-inventors
87Inventor score

Filing activity: Nov 28, 2006 → Mar 14, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US7989365B2 Remote plasma source seasoning Emerging Cross-Sectional Technologies 599 Active
US9132436B2 Chemical control features in wafer process equipment Electricity 197 Active
US9117855B2 Polarity control for remote plasma Electricity 183 Active
US8969212B2 Dry-etch selectivity Electricity 182 Active
US9299537B2 Radial waveguide systems and methods for post-match control of microwaves Electricity 157 Active
US9299538B2 Radial waveguide systems and methods for post-match control of microwaves Electricity 153 Active
US9299582B2 Selective etch for metal-containing materials Electricity 153 Active
US9355922B2 Systems and methods for internal surface conditioning in plasma processing equipment Electricity 147 Active
US9384997B2 Dry-etch selectivity Electricity 145 Active
US9472417B2 Plasma-free metal etch Electricity 136 Active
US9373517B2 Semiconductor processing with DC assisted RF power for improved control Electricity 135 Active
US9564296B2 Radial waveguide systems and methods for post-match control of microwaves Electricity 129 Active
US9659753B2 Grooved insulator to reduce leakage current Electricity 123 Active
US9728437B2 High temperature chuck for plasma processing systems Electricity 117 Active
US9711366B2 Selective etch for metal-containing materials Electricity 115 Active
US9773648B2 Dual discharge modes operation for remote plasma Electricity 113 Active
US9837249B2 Radial waveguide systems and methods for post-match control of microwaves Electricity 111 Active
US8894767B2 Flow control features of CVD chambers Emerging Cross-Sectional Technologies 105 Active
US9978564B2 Chemical control features in wafer process equipment Electricity 105 Active
US9947549B1 Cobalt-containing material removal Electricity 103 Active
US9966240B2 Systems and methods for internal surface conditioning assessment in plasma processing equipment Electricity 100 Active
US10032606B2 Semiconductor processing with DC assisted RF power for improved control Electricity 94 Active
US9593421B2 Particle generation suppressor by DC bias modulation Electricity 55 Active
US10354843B2 Chemical control features in wafer process equipment Electricity 38 Active
US9892888B2 Particle generation suppresor by DC bias modulation Electricity 23 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.