Inventor · Praha, CZ

Stanislav Kadlec

18Patents
5h-index
20Co-inventors
66Inventor score

Filing activity: Apr 16, 1992 → Sep 15, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US5234560A Method and device for sputtering of films Electricity 68 Expired
US8574409B2 Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source Electricity 14 Active
US9355824B2 Arc suppression and pulsing in high power impulse magnetron sputtering (HIPIMS) Electricity 12 Active
US9587306B2 Method for producing a directional layer by cathode sputtering, and device for implementing the method Electricity 11 Active
US6860977B2 Method for manufacturing a workpiece using a magnetron sputter source Electricity 8 Expired
US6682637B2 Magnetron sputter source Electricity 4 Expired
US7138343B2 Method of producing a substrate with a surface treated by a vacuum treatment process, use of said method for the production of coated workpieces and plasma treatment chamber Chemistry; Metallurgy 4 Expired
US7718042B2 Method for manufacturing sputter-coated substrates, magnetron source and sputtering chamber with such source Electricity 2 Active
US9611537B2 Target shaping Electricity 2 Active
US8435389B2 RF substrate bias with high power impulse magnetron sputtering (HIPIMS) Electricity 2 Active
US10784092B2 Reactive sputtering with HIPIMs Electricity 1 Active
US8246794B2 Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source Electricity 1 Active
US10692707B2 RF substrate bias with high power impulse magnetron sputtering (HIPIMS) Electricity 1 Active
US8475634B2 Application of HIPIMS to through silicon via metallization in three-dimensional wafer packaging Electricity 0 Active
US11380530B2 Reactive sputtering with HIPIMS Electricity 0 Active
US11842871B2 Low voltage MEMS relay filled with alternative gas mixture to SF6 Electricity 0 Active
US11211234B2 Arc suppression and pulsing in high power impulse magnetron sputtering (HIPIMS) Electricity 0 Active
US7429543B2 Method for the production of a substrate Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.