Inventor · Sendai, JP

Takeo Ushiki

19Patents
9h-index
9Co-inventors
61Inventor score

Filing activity: May 13, 1998 → Oct 9, 2008

Most-cited inventions

PatentTitleAreaCited byStatus
US6255731A SOI bonding structure Electricity 111 Expired
US6768324B1 Semiconductor device tester which measures information related to a structure of a sample in a depth direction Electricity 97 Expired
US6683308B2 Method and apparatus for measuring thickness of thin film Electricity 45 Expired
US6559662B1 Semiconductor device tester and semiconductor device test method Physics 25 Expired
US6614244B2 Semiconductor device inspecting apparatus Physics 18 Expired
US6258244A Treating method and apparatus utilizing chemical reaction Electricity 14 Expired
US7385195B2 Semiconductor device tester Electricity 13 Expired
US6946857B2 Semiconductor device tester Electricity 12 Expired
US6975125B2 Semiconductor device tester Electricity 9 Expired
US7321805B2 Production managing system of semiconductor device Electricity 8 Expired
US6850079B2 Film thickness measuring apparatus and a method for measuring a thickness of a film Electricity 7 Expired
US6943043B2 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device Electricity 4 Expired
US6711453B2 Production managing system of semiconductor device Electricity 4 Expired
US6842663B2 Production managing system of semiconductor device Electricity 2 Expired
US7002361B2 Film thickness measuring apparatus and a method for measuring a thickness of a film Electricity 2 Expired
US6753194B2 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device Electricity 2 Expired
US6837936B2 Semiconductor manufacturing device Physics 1 Expired
US7795593B2 Surface contamination analyzer for semiconductor wafers Electricity 0 Active
US7700380B2 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.