Inventor · Hsinchu, TW

Wan-Yih Lien

15Patents
10h-index
22Co-inventors
64Inventor score

Filing activity: May 7, 1998 → Apr 2, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US6037216A Method for simultaneously fabricating capacitor structures, for giga-bit DRAM cells, and peripheral interconnect structures, using a dual damascene process Electricity 65 Expired
US6022776A Method of using silicon oxynitride to improve fabricating of DRAM contacts and landing pads Electricity 45 Expired
US6673683B1 Damascene gate electrode method for fabricating field effect transistor (FET) device with ion implanted lightly doped extension regions Electricity 33 Expired
US6080664A Method for fabricating a high aspect ratio stacked contact hole Electricity 28 Expired
US6124165A Method for making openings in a passivation layer over polycide fuses using a single mask while forming reliable tungsten via plugs on DRAMs Electricity 23 Expired
US6338993B1 Method to fabricate embedded DRAM with salicide logic cell structure Electricity 16 Expired
US6001717A Method of making local interconnections for dynamic random access memory (DRAM) circuits with reduced contact resistance and reduced mask set Electricity 15 Expired
US6103623A Method for fabricating a tungsten plug structure and an overlying interconnect metal structure without a tungsten etch back or CMP procedure Electricity 14 Expired
US6136646A Method for manufacturing DRAM capacitor Electricity 10 Expired
US6211091A Self-aligned eetching process Electricity 10 Expired
US6074952A Method for forming multi-level contacts Electricity 7 Expired
US6876027B2 Method of forming a metal-insulator-metal capacitor structure in a copper damascene process sequence Electricity 5 Expired
US6096579A Method for controlling the thickness of a passivation layer on a semiconductor device Electricity 5 Expired
US6303955A Dynamic random access memory with slanted active regions Emerging Cross-Sectional Technologies 2 Expired
US7071478B2 System and method for passing particles on selected areas on a wafer Electricity 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.