Inventor · Potsdam, NY, US

Xian J. Ning

37Patents
14h-index
16Co-inventors
74Inventor score

Filing activity: Dec 23, 1997 → Oct 14, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US6611453B2 Self-aligned cross-point MRAM device with aluminum metallization layers Electricity 81 Expired
US6692898B2 Self-aligned conductive line for cross-point magnetic memory integrated circuits Electricity 64 Expired
US6620701B2 Method of fabricating a metal-insulator-metal (MIM) capacitor Electricity 41 Expired
US6709874B2 Method of manufacturing a metal cap layer for preventing damascene conductive lines from oxidation Electricity 37 Expired
US6451667B1 Self-aligned double-sided vertical MIMcap Electricity 36 Expired
US6794262B2 MIM capacitor structures and fabrication methods in dual-damascene structures Electricity 35 Expired
US5865901A Wafer surface cleaning apparatus and method Emerging Cross-Sectional Technologies 30 Expired
US6440753B1 Metal hard mask for ILD RIE processing of semiconductor memory devices to prevent oxidation of conductive lines Emerging Cross-Sectional Technologies 29 Expired
US6723600B2 Method for making a metal-insulator-metal capacitor using plate-through mask techniques Electricity 26 Expired
US6979526B2 Lithography alignment and overlay measurement marks formed by resist mask blocking for MRAMs Electricity 22 Expired
US6184134A Dry process for cleaning residues/polymers after metal etch Emerging Cross-Sectional Technologies 20 Expired
US5903343A Method for detecting under-etched vias Physics 19 Expired
US6706588B1 Method of fabricating an integrated circuit having embedded vertical capacitor Electricity 16 Expired
US6815248B2 Material combinations for tunnel junction cap layer, tunnel junction hard mask and tunnel junction stack seed layer in MRAM processing Electricity 15 Expired
US6780775B2 Design of lithography alignment and overlay measurement marks on CMP finished damascene surface Electricity 14 Expired
US6033984A Dual damascene with bond pads Electricity 11 Expired
US6677635B2 Stacked MIMCap between Cu dual damascene levels Electricity 8 Expired
US7547595B2 Integration scheme method and structure for transistors using strained silicon Electricity 7 Active
US7591659B2 Method and structure for second spacer formation for strained silicon MOS transistors Electricity 6 Active
US6960365B2 Vertical MIMCap manufacturing method Electricity 6 Expired
US7820500B2 Single mask scheme method and structure for integrating PMOS and NMOS transistors using strained silicon Electricity 6 Active
US7015110B2 Method and structure of manufacturing high capacitance metal on insulator capacitors in copper Electricity 6 Expired
US7425488B2 Method and structure using a pure silicon dioxide hardmask for gate patterning for strained silicon MOS transistors Electricity 5 Expired
US6750115B1 Method for generating alignment marks for manufacturing MIM capacitors Electricity 4 Expired
US7709336B2 Metal hard mask method and structure for strained silicon MOS transistors Electricity 4 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.