Inventor · Tokyo, JP

Yohei IKEBE

27Patents
4h-index
8Co-inventors
52Inventor score

Filing activity: Feb 20, 2014 → Dec 4, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US10481484B2 Reflective mask blank, reflective mask, method for manufacturing reflective mask blank, and method for manufacturing semiconductor device Chemistry; Metallurgy 9 Active
US10394113B2 Reflective mask blank, reflective mask and method of manufacturing semiconductor device Chemistry; Metallurgy 7 Active
US9864267B2 Reflective mask blank, reflective mask, and method for manufacturing semiconductor device Chemistry; Metallurgy 7 Active
US10871707B2 Reflective mask blank, reflective mask and method of manufacturing semiconductor device Electricity 5 Active
US11480867B2 Reflective mask blank, reflective mask and method of manufacturing semiconductor device Physics 2 Active
US11003068B2 Reflective mask blank, reflective mask and method of manufacturing semiconductor device Physics 2 Active
US11531264B2 Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method Physics 2 Active
US11550215B2 Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device Physics 1 Active
US10921705B2 Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device Chemistry; Metallurgy 1 Active
US10067419B2 Method for manufacturing reflective mask blank, and method for manufacturing reflective mask Physics 1 Active
US11187972B2 Reflective mask blank, method of manufacturing reflective mask and method of manufacturing semiconductor device Physics 1 Active
US11281090B2 Substrate with a multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device Physics 0 Active
US11815807B2 Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device Physics 0 Active
US12228852B2 Reflective mask blank, reflective mask and method for manufacturing a semiconductor device Physics 0 Active
US11880130B2 Reflective mask blank, reflective mask and method of manufacturing semiconductor device Physics 0 Active
US11237472B2 Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method Physics 0 Active
US12111566B2 Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method Physics 0 Active
US12411402B2 Reflective mask blank, reflective mask, and method for manufacturing semiconductor device Physics 0 Active
US11914281B2 Reflective mask blank, reflective mask, and method for manufacturing semiconductor device Physics 0 Active
US11815806B2 Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method Physics 0 Active
US11249385B2 Reflective mask blank, reflective mask, method of manufacturing same, and method of manufacturing semiconductor device Physics 0 Active
US10642149B2 Reflective mask blank, reflective mask and method of manufacturing semiconductor device Chemistry; Metallurgy 0 Active
US11892768B2 Reflective mask blank, reflective mask and method of manufacturing the same, and method of manufacturing semiconductor device Physics 0 Active
US11131921B2 Method for manufacturing reflective mask blank, and method for manufacturing reflective mask Physics 0 Active
US12105413B2 Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.