Yoshikazu Furusawa
16Patents
4h-index
25Co-inventors
60Inventor score
Filing activity: Mar 22, 1995 → Sep 24, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7648895B2 | Vertical CVD apparatus for forming silicon-germanium film | Chemistry; Metallurgy | 321 | Active |
| US5547580A | Purification method of crude product | Performing Operations; Transporting | 19 | Expired |
| USD588078S1 | Heat dissipation deterrence link for semiconductor manufacture | General | 12 | Expired |
| US7208428B2 | Method and apparatus for treating article to be treated | Electricity | 5 | Expired |
| US7273818B2 | Film formation method and apparatus for semiconductor process | Electricity | 4 | Expired |
| US9758865B2 | Silicon film forming method, thin film forming method and cross-sectional shape control method | Electricity | 4 | Active |
| US7064084B2 | Oxide film forming method | Emerging Cross-Sectional Technologies | 2 | Expired |
| US9540743B2 | Amorphous silicon crystallizing method, crystallized silicon film forming method, semiconductor device manufacturing method and film forming apparatus | Emerging Cross-Sectional Technologies | 2 | Active |
| US8518488B2 | Method for using apparatus configured to form germanium-containing film | Emerging Cross-Sectional Technologies | 1 | Active |
| USD588079S1 | Heat dissipation deterrence link for semiconductor manufacture | General | 1 | Expired |
| US9478423B2 | Method of vapor-diffusing impurities | Electricity | 0 | Active |
| US9171722B2 | Method of vapor-diffusing impurities | General | 0 | Revoked |
| US8906792B2 | Impurity diffusion method, substrate processing apparatus, and method of manufacturing semiconductor device | Electricity | 0 | Active |
| US10619247B2 | Substrate processing apparatus, injector, and substrate processing method | Electricity | 0 | Active |
| US10573518B2 | Film forming method and vertical thermal processing apparatus | Electricity | 0 | Active |
| US11585649B2 | Shift drum angle detecting device for transmission | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.