Inventor · Singapore, SG

Alex See

55Patents
15h-index
76Co-inventors
83Inventor score

Filing activity: Sep 9, 1999 → Dec 18, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US6303418A Method of fabricating CMOS devices featuring dual gate structures and a high dielectric constant gate insulator layer Electricity 316 Expired
US6261935A Method of forming contact to polysilicon gate for MOS devices Electricity 194 Expired
US6348385B1 Method for a short channel CMOS transistor with small overlay capacitance using in-situ doped spacers with a low dielectric constant Electricity 65 Expired
US6897118B1 Method of multiple pulse laser annealing to activate ultra-shallow junctions Electricity 60 Expired
US6387747B1 Method to fabricate RF inductors with minimum area Electricity 35 Expired
US6391731B1 Activating source and drain junctions and extensions using a single laser anneal Electricity 29 Expired
US6355563B1 Versatile copper-wiring layout design with low-k dielectric integration Electricity 27 Expired
US6365446B1 Formation of silicided ultra-shallow junctions using implant through metal technology and laser annealing process Electricity 25 Expired
US6281082A Method to form MOS transistors with a common shallow trench isolation and interlevel dielectric gap fill Electricity 23 Expired
US6335253B1 Method to form MOS transistors with shallow junctions using laser annealing Electricity 23 Expired
US6319767A Method to eliminate top metal corner shaping during bottom metal patterning for MIM capacitors via plasma ashing and hard masking technique Electricity 21 Expired
US7091092B2 Process flow for a performance enhanced MOSFET with self-aligned, recessed channel Electricity 20 Expired
US6613652B2 Method for fabricating SOI devices with option of incorporating air-gap feature for better insulation and performance Electricity 20 Expired
US6391720B1 Process flow for a performance enhanced MOSFET with self-aligned, recessed channel Electricity 19 Expired
US6650220B2 Parallel spiral stacked inductor on semiconductor material Emerging Cross-Sectional Technologies 15 Expired
US6899857B2 Method for forming a region of low dielectric constant nanoporous material using a microemulsion technique Electricity 14 Expired
US6475875B1 Shallow trench isolation elevation uniformity via insertion of a polysilicon etch layer Electricity 13 Expired
US6624489B2 Formation of silicided shallow junctions using implant through metal technology and laser annealing process Electricity 11 Expired
US8518775B2 Integration of eNVM, RMG, and HKMG modules Electricity 9 Active
US6380066B1 Methods for eliminating metal corrosion by FSG Electricity 8 Expired
US6432797B1 Simplified method to reduce or eliminate STI oxide divots Electricity 8 Expired
US6468880B1 Method for fabricating complementary silicon on insulator devices using wafer bonding Emerging Cross-Sectional Technologies 8 Expired
US7112499B2 Dual step source/drain extension junction anneal to reduce the junction depth: multiple-pulse low energy laser anneal coupled with rapid thermal anneal Electricity 8 Expired
US6905964B2 Method of fabricating self-aligned metal barriers by atomic layer deposition on the copper layer Electricity 7 Expired
US6436833B1 Method for pre-STI-CMP planarization using poly-si thermal oxidation Electricity 6 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.