Inventor · Madou, TW

Chun-Lang Chen

48Patents
4h-index
24Co-inventors
63Inventor score

Filing activity: Jun 4, 1993 → Jul 21, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US8715890B2 Semiconductor mask blanks with a compatible stop layer Electricity 84 Active
US5983747A Auxiliary handlebar of bicycle Emerging Cross-Sectional Technologies 23 Expired
US8882304B2 Illuminating device and packaging method thereof Electricity 6 Active
US7043327B2 Lithography apparatus and method employing non-environmental variable correction Physics 5 Expired
US9373551B2 Moveable and adjustable gas injectors for an etching chamber Electricity 3 Active
US9953833B2 Semiconductor mask blanks with a compatible stop layer Electricity 3 Active
US10553428B2 Reflection mode photomask and fabrication method therefore Electricity 3 Active
US10276426B2 System and method for performing spin dry etching Electricity 3 Active
US10845698B2 Mask, method of forming the same and method of manufacturing a semiconductor device using the same Electricity 2 Active
US9921467B2 Mask blank and mask and fabrication method thereof Electricity 2 Active
US10095102B2 Photomask having a plurality of shielding layers Physics 2 Active
US11270884B2 Reflection mode photomask Electricity 2 Active
USD348203S Automobile steering lock General 2 Expired
US8563351B2 Method for manufacturing photovoltaic device Emerging Cross-Sectional Technologies 2 Active
US9122175B2 Image mask film scheme and method Physics 1 Active
US8999611B2 Mask blank for scattering effect reduction Physics 1 Active
US9829786B2 PSM blank for enhancing small size CD resolution Physics 1 Active
US11662656B2 Mask and method of forming the same Electricity 1 Active
US10698313B2 Apparatus and method for developing a photoresist coated substrate Physics 1 Active
US9142423B2 Semiconductor mask blanks with a compatible stop layer Electricity 1 Active
US10007176B2 Graphene pellicle for extreme ultraviolet lithography Chemistry; Metallurgy 1 Active
US11735421B2 Reflection mode photomask and method of making Electricity 1 Active
US8981557B2 Method for forming photovoltaic cell, and resulting photovoltaic cell Emerging Cross-Sectional Technologies 1 Active
US9581894B2 Image mask film scheme and method Physics 1 Active
US7368229B2 Composite layer method for minimizing PED effect Emerging Cross-Sectional Technologies 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.