Inventor · Altötting, DE

Franz Koppl

19Patents
11h-index
17Co-inventors
69Inventor score

Filing activity: Jul 13, 1976 → Mar 29, 2000

Most-cited inventions

PatentTitleAreaCited byStatus
US4179530A Process for the deposition of pure semiconductor material Chemistry; Metallurgy 350 Expired
US4131659A Process for producing large-size, self-supporting plates of silicon Emerging Cross-Sectional Technologies 36 Expired
US4311545A Method for the deposition of pure semiconductor material Chemistry; Metallurgy 33 Expired
US4536642A Device for treating gases at high temperatures Performing Operations; Transporting 29 Expired
US6375011B1 Vibrating conveyor and method for conveying silicon fragments Performing Operations; Transporting 19 Expired
US4173944A Silverplated vapor deposition chamber Chemistry; Metallurgy 17 Expired
US6040544A Optoelectronic separation apparatus Performing Operations; Transporting 13 Expired
US5820688A Method for the treatment of semiconductor material Emerging Cross-Sectional Technologies 13 Expired
US5660335A Method and device for the comminution of semiconductor material Performing Operations; Transporting 12 Expired
US4454104A Process for working up the residual gases obtained in the deposition of silicon and in the conversion of silicon tetrachloride Chemistry; Metallurgy 12 Expired
US4113532A Process for producing large-size substrate-based semiconductor material utilizing vapor-phase deposition and subsequent resolidification Emerging Cross-Sectional Technologies 12 Expired
US4213830A Method for the transfer of heat Emerging Cross-Sectional Technologies 10 Expired
US4252780A Process for working up hydrolyzable and/or water-soluble compounds Emerging Cross-Sectional Technologies 9 Expired
US4065533A Process for the continuous production of silicon rods or tubes by gaseous deposition into a flexible wound band Chemistry; Metallurgy 8 Expired
US4515762A Process for processing waste gases resulting during the production of silicon Chemistry; Metallurgy 6 Expired
US6024306A Device and method for fragmenting semiconductor material Performing Operations; Transporting 6 Expired
US4062714A Process for making hollow silicon bodies and bodies utilizing board-shaped members to form the basic geometric shape so made Chemistry; Metallurgy 6 Expired
US4160797A Process for the deposition of polycrystalline silicon from the gas phase on heated carriers Electricity 5 Expired
US4211040A Process for machining silicon rods and tubes by abrasion Performing Operations; Transporting 4 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.