Inventor · Tigard, OR, US

James S. Sims

23Patents
12h-index
35Co-inventors
77Inventor score

Filing activity: Aug 20, 2004 → Dec 20, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US7745346B2 Method for improving process control and film conformality of PECVD film Electricity 517 Active
US9214333B1 Methods and apparatuses for uniform reduction of the in-feature wet etch rate of a silicon nitride film formed by ALD Electricity 496 Active
US7214630B1 PMOS transistor with compressive dielectric capping layer Electricity 477 Expired
US9865455B1 Nitride film formed by plasma-enhanced and thermal atomic layer deposition process Electricity 401 Active
US10347547B2 Suppressing interfacial reactions by varying the wafer temperature throughout deposition Electricity 383 Active
US9824884B1 Method for depositing metals free ald silicon nitride films using halide-based precursors Electricity 324 Active
US9076646B2 Plasma enhanced atomic layer deposition with pulsed plasma exposure Electricity 75 Active
US7906817B1 High compressive stress carbon liners for MOS devices Electricity 31 Active
US8211510B1 Cascaded cure approach to fabricate highly tensile silicon nitride films Electricity 28 Active
US8512818B1 Cascaded cure approach to fabricate highly tensile silicon nitride films Electricity 20 Active
US9589790B2 Method of depositing ammonia free and chlorine free conformal silicon nitride film Chemistry; Metallurgy 19 Active
US7041543B1 Strained transistor architecture and method Electricity 16 Expired
US7327001B1 PMOS transistor with compressive dielectric capping layer Electricity 10 Active
US7998881B1 Method for making high stress boron-doped carbon films Electricity 8 Active
US9659769B1 Tensile dielectric films using UV curing Electricity 6 Active
US8362571B1 High compressive stress carbon liners for MOS devices Electricity 3 Active
US11239420B2 Conformal damage-free encapsulation of chalcogenide materials Electricity 1 Active
US9315899B2 Contoured showerhead for improved plasma shaping and control Electricity 0 Active
US9598770B2 Contoured showerhead for improved plasma shaping and control Electricity 0 Active
US11832533B2 Conformal damage-free encapsulation of chalcogenide materials Electricity 0 Active
US10020188B2 Method for depositing ALD films using halide-based precursors Electricity 0 Active
US12230495B2 Method of depositing silicon nitride films Electricity 0 Active
US11075127B2 Suppressing interfacial reactions by varying the wafer temperature throughout deposition Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.