Inventor · Santa Clara, CA, US

Kapila Wijekoon

24Patents
12h-index
45Co-inventors
77Inventor score

Filing activity: Aug 8, 1997 → Jan 11, 2013

Most-cited inventions

PatentTitleAreaCited byStatus
US6537144B1 Method and apparatus for enhanced CMP using metals having reductive properties Electricity 64 Expired
US7951637B2 Back contact solar cells using printed dielectric barrier Emerging Cross-Sectional Technologies 56 Active
US6146259A Carrier head with local pressure control for a chemical mechanical polishing apparatus Performing Operations; Transporting 53 Expired
US6309276A Endpoint monitoring with polishing rate change Performing Operations; Transporting 51 Expired
US6561873B2 Method and apparatus for enhanced CMP using metals having reductive properties Electricity 27 Expired
US7514353B2 Contact metallization scheme using a barrier layer over a silicide layer Electricity 25 Active
US6638143B2 Ion exchange materials for chemical mechanical polishing Electricity 23 Expired
US8183081B2 Hybrid heterojunction solar cell fabrication using a metal layer mask Emerging Cross-Sectional Technologies 21 Active
US7651934B2 Process for electroless copper deposition Electricity 16 Active
US7070480B2 Method and apparatus for polishing substrates Performing Operations; Transporting 15 Expired
US6572453B1 Multi-fluid polishing process Chemistry; Metallurgy 12 Expired
US6218306A Method of chemical mechanical polishing a metal layer Emerging Cross-Sectional Technologies 12 Expired
US8309446B2 Hybrid heterojunction solar cell fabrication using a doping layer mask Emerging Cross-Sectional Technologies 9 Active
US8129212B2 Surface cleaning and texturing process for crystalline solar cells Emerging Cross-Sectional Technologies 8 Active
US6511367B2 Carrier head with local pressure control for a chemical mechanical polishing apparatus Performing Operations; Transporting 8 Expired
US6620027B2 Method and apparatus for hard pad polishing Performing Operations; Transporting 8 Expired
US8207005B2 Forming solar cells using a patterned deposition process Emerging Cross-Sectional Technologies 7 Active
US6790768B2 Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects Electricity 6 Expired
US6368191B1 Carrier head with local pressure control for a chemical mechanical polishing apparatus Performing Operations; Transporting 5 Expired
US8152981B2 Methods and compositions for electrophoretic metallization deposition Emerging Cross-Sectional Technologies 4 Active
US7153188B1 Temperature control in a chemical mechanical polishing system Performing Operations; Transporting 3 Expired
US6960521B2 Method and apparatus for polishing metal and dielectric substrates Electricity 3 Expired
US8859324B2 Methods of manufacturing solar cell devices Emerging Cross-Sectional Technologies 1 Active
US8216441B2 Electrophoretic solar cell metallization process and apparatus Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.