Kapila Wijekoon
24Patents
12h-index
45Co-inventors
77Inventor score
Filing activity: Aug 8, 1997 → Jan 11, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6537144B1 | Method and apparatus for enhanced CMP using metals having reductive properties | Electricity | 64 | Expired |
| US7951637B2 | Back contact solar cells using printed dielectric barrier | Emerging Cross-Sectional Technologies | 56 | Active |
| US6146259A | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Performing Operations; Transporting | 53 | Expired |
| US6309276A | Endpoint monitoring with polishing rate change | Performing Operations; Transporting | 51 | Expired |
| US6561873B2 | Method and apparatus for enhanced CMP using metals having reductive properties | Electricity | 27 | Expired |
| US7514353B2 | Contact metallization scheme using a barrier layer over a silicide layer | Electricity | 25 | Active |
| US6638143B2 | Ion exchange materials for chemical mechanical polishing | Electricity | 23 | Expired |
| US8183081B2 | Hybrid heterojunction solar cell fabrication using a metal layer mask | Emerging Cross-Sectional Technologies | 21 | Active |
| US7651934B2 | Process for electroless copper deposition | Electricity | 16 | Active |
| US7070480B2 | Method and apparatus for polishing substrates | Performing Operations; Transporting | 15 | Expired |
| US6572453B1 | Multi-fluid polishing process | Chemistry; Metallurgy | 12 | Expired |
| US6218306A | Method of chemical mechanical polishing a metal layer | Emerging Cross-Sectional Technologies | 12 | Expired |
| US8309446B2 | Hybrid heterojunction solar cell fabrication using a doping layer mask | Emerging Cross-Sectional Technologies | 9 | Active |
| US8129212B2 | Surface cleaning and texturing process for crystalline solar cells | Emerging Cross-Sectional Technologies | 8 | Active |
| US6511367B2 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Performing Operations; Transporting | 8 | Expired |
| US6620027B2 | Method and apparatus for hard pad polishing | Performing Operations; Transporting | 8 | Expired |
| US8207005B2 | Forming solar cells using a patterned deposition process | Emerging Cross-Sectional Technologies | 7 | Active |
| US6790768B2 | Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects | Electricity | 6 | Expired |
| US6368191B1 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Performing Operations; Transporting | 5 | Expired |
| US8152981B2 | Methods and compositions for electrophoretic metallization deposition | Emerging Cross-Sectional Technologies | 4 | Active |
| US7153188B1 | Temperature control in a chemical mechanical polishing system | Performing Operations; Transporting | 3 | Expired |
| US6960521B2 | Method and apparatus for polishing metal and dielectric substrates | Electricity | 3 | Expired |
| US8859324B2 | Methods of manufacturing solar cell devices | Emerging Cross-Sectional Technologies | 1 | Active |
| US8216441B2 | Electrophoretic solar cell metallization process and apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.