Inventor · Shizuoka, JP

Keeyoung Park

11Patents
1h-index
7Co-inventors
39Inventor score

Filing activity: Dec 2, 2015 → Aug 16, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US10533146B2 Cleaning formulations for removing residues on semiconductor substrates Chemistry; Metallurgy 7 Active
US11508569B2 Surface treatment compositions and methods Performing Operations; Transporting 1 Active
US10593538B2 Surface treatment methods and compositions therefor Chemistry; Metallurgy 1 Active
US10619126B2 Cleaning compositions and methods of use therefor Chemistry; Metallurgy 1 Active
US9809746B2 Etching liquid, kit of same, etching method using same, method for producing semiconductor substrate product, and method for manufacturing semiconductor element Electricity 0 Active
US11447642B2 Methods of using surface treatment compositions Electricity 0 Active
US11174394B2 Surface treatment compositions and articles containing same Electricity 0 Active
US10049883B2 MRAM dry etching residue removal composition, method of producing magnetoresistive random access memory, and cobalt removal composition Physics 0 Active
US10714682B2 Ruthenium removal composition and method of producing magnetoresistive random access memory Electricity 0 Active
US11456412B2 Ruthenium removal composition and method of producing magnetoresistive random access memory Electricity 0 Active
US12150386B2 Ruthenium removal composition and method of producing magnetoresistive random access memory Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.