Inventor · Tokyo, JP

Kenichi Oyama

16Patents
5h-index
32Co-inventors
66Inventor score

Filing activity: Feb 19, 1993 → May 17, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US5929479A Floating gate type non-volatile semiconductor memory for storing multi-value information Electricity 178 Expired
US5327385A Method of erasure for a non-volatile semiconductor memory device Physics 20 Expired
US5691552A Nonvolatile semiconductor memory formed with silicon-on-insulator structure Electricity 16 Expired
US9418860B2 Use of topography to direct assembly of block copolymers in grapho-epitaxial applications Electricity 10 Active
US7094994B2 Heat treatment apparatus and method of semiconductor wafer Electricity 7 Expired
US6013552A Method of manufacturing a split-gate flash memory cell Electricity 3 Expired
US9023225B2 Pattern forming method Performing Operations; Transporting 2 Active
US11444511B2 Vibration damping device and electrically driven actuator Mechanical Engineering; Lighting; Heating 1 Active
US8383990B2 Substrate transport apparatus and heat treatment apparatus Electricity 1 Active
US10211050B2 Method for photo-lithographic processing in semiconductor device manufacturing Electricity 1 Active
US11694872B2 Pattern enhancement using a gas cluster ion beam Electricity 0 Active
US8687405B2 Phase change memory and method for fabricating phase change memory Physics 0 Active
US10317797B2 Pattern forming method for forming a pattern Electricity 0 Active
US12165848B2 Substrate processing method, substrate processing apparatus, and method for producing nanowire or nanosheet transistor Electricity 0 Active
US11450506B2 Pattern enhancement using a gas cluster ion beam Electricity 0 Active
US9459535B2 Method of forming pattern Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.