Kunihiro Tada
19Patents
7h-index
19Co-inventors
63Inventor score
Filing activity: Aug 24, 1995 → Sep 18, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5709757A | Film forming and dry cleaning apparatus and method | Emerging Cross-Sectional Technologies | 78 | Expired |
| US6051281A | Method of forming a titanium film and a barrier metal film on a surface of a substrate through lamination | Electricity | 17 | Expired |
| US5942282A | Method for depositing a titanium film | Electricity | 15 | Expired |
| US6919273B1 | Method for forming TiSiN film, diffusion preventive film comprising TiSiN film, semiconductor device and its production method, and apparatus for forming TiSiN film | Electricity | 9 | Expired |
| US6537621B1 | Method of forming a titanium film and a barrier film on a surface of a substrate through lamination | Electricity | 8 | Expired |
| US7153773B2 | TiSiN film forming method, diffusion barrier TiSiN film, semiconductor device, method of fabricating the same and TiSiN film forming system | Electricity | 7 | Expired |
| US6451388B1 | Method of forming titanium film by chemical vapor deposition | Electricity | 7 | Expired |
| US6177149A | Method of forming titanium film by CVD | Chemistry; Metallurgy | 7 | Expired |
| US6004872A | Method of manufacturing semiconductor device | Electricity | 6 | Expired |
| US6197674A | CVD-Ti film forming method | Electricity | 4 | Expired |
| US6069093A | Process of forming metal films and multi layer structure | Electricity | 4 | Expired |
| US7737005B2 | Method for forming Ti film and TiN film, contact structure, computer readable storing medium and computer program | Emerging Cross-Sectional Technologies | 4 | Active |
| US7484513B2 | Method of forming titanium film by CVD | Electricity | 3 | Expired |
| US8257790B2 | Ti-containing film formation method and storage medium | Chemistry; Metallurgy | 3 | Active |
| US8106335B2 | Processing apparatus and heater unit | Electricity | 2 | Active |
| US8124168B2 | Substrate processing method and substrate processing apparatus | Electricity | 1 | Active |
| US6841203B2 | Method of forming titanium film by CVD | Electricity | 1 | Expired |
| US8785310B2 | Method of forming conformal metal silicide films | Electricity | 1 | Active |
| US10815567B2 | Deposition device and deposition method | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.