Inventor · Foster City, CA, US

Robert C. Pack

16Patents
9h-index
18Co-inventors
65Inventor score

Filing activity: Dec 29, 2000 → Dec 13, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US7231628B2 Method and system for context-specific mask inspection Physics 279 Expired
US8453102B1 Hierarchical variation analysis of integrated circuits Emerging Cross-Sectional Technologies 50 Active
US7302672B2 Method and system for context-specific mask writing Physics 46 Expired
US6562638B1 Integrated scheme for predicting yield of semiconductor (MOS) devices from designed layout Electricity 35 Expired
US8468482B1 Modeling and simulating the impact of imperfectly patterned via arrays on integrated circuits Emerging Cross-Sectional Technologies 27 Active
US7249342B2 Method and system for context-specific mask writing Physics 22 Expired
US9343267B2 Method and system for dimensional uniformity using charged particle beam lithography Electricity 12 Active
US7024638B2 Method for creating patterns for producing integrated circuits Physics 12 Expired
US9038003B2 Method and system for critical dimension uniformity using charged particle beam lithography Physics 10 Active
US8407627B2 Method and system for context-specific mask inspection Physics 5 Active
US8959463B2 Method and system for dimensional uniformity using charged particle beam lithography Electricity 4 Active
US7784016B2 Method and system for context-specific mask writing Physics 3 Active
US9859100B2 Method and system for dimensional uniformity using charged particle beam lithography Electricity 2 Active
US8745549B2 Method and system for forming high precision patterns using charged particle beam lithography Electricity 1 Active
US10055535B2 Method, system and program product for identifying anomalies in integrated circuit design layouts Emerging Cross-Sectional Technologies 0 Active
US10431422B2 Method and system for dimensional uniformity using charged particle beam lithography Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.