Shigeyoshi Netsu
44Patents
7h-index
31Co-inventors
69Inventor score
Filing activity: Dec 10, 1991 → Oct 15, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5733434A | Apparatus and method for cleaning semiconductor wafers | Chemistry; Metallurgy | 43 | Expired |
| US5186192A | Apparatus for cleaning silicon wafer | Emerging Cross-Sectional Technologies | 39 | Expired |
| US5725753A | Apparatus and method for cleaning semiconductor wafers | Chemistry; Metallurgy | 35 | Expired |
| US6003527A | Cleaning apparatus and a cleaning method | Emerging Cross-Sectional Technologies | 30 | Expired |
| US7582221B2 | Wafer manufacturing method, polishing apparatus, and wafer | Performing Operations; Transporting | 28 | Expired |
| US5538465A | Elastic foamed sheet and wafer-polishing jig using the sheet | Emerging Cross-Sectional Technologies | 15 | Expired |
| US5409770A | Elastic foamed sheet and wafer-polishing jig using the sheet | Emerging Cross-Sectional Technologies | 14 | Expired |
| US6099748A | Silicon wafer etching method and silicon wafer etchant | Electricity | 7 | Expired |
| US6787797B2 | Semiconductor wafer and device for semiconductor device manufacturing process | Electricity | 5 | Expired |
| US9274069B2 | Method for evaluating degree of crystalline orientation of polycrystalline silicon, method for selecting polycrystalline silicon rod, polycrystalline silicon rod, polycrystalline silicon ingot, and method for manufacturing monocrystalline silicon | Physics | 2 | Active |
| US7203559B2 | Method for manufacturing semiconductor wafer, method for receiving order for manufacture of semiconductor wafer, and system for receiving order for manufacture of semiconductor wafer | Emerging Cross-Sectional Technologies | 2 | Expired |
| US10377636B2 | Method for producing polycrystalline silicon rod, polycrystalline silicon rod, and polycrystalline silicon mass | Chemistry; Metallurgy | 2 | Active |
| US9193596B2 | Reactor for producing polycrystalline silicon, system for producing polycrystalline silicon, and process for producing polycrystalline silicon | Emerging Cross-Sectional Technologies | 1 | Active |
| US9437429B2 | Polycrystalline silicon manufacturing apparatus and polycrystalline silicon manufacturing method | Electricity | 1 | Active |
| US11167994B2 | Polycrystalline silicon rod, processing method for polycrystalline silicon rod, method for evaluating polycrystalline silicon rod, and method for producing FZ single crystal silicon | Chemistry; Metallurgy | 1 | Active |
| US9017482B2 | System for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, and process for producing polycrystalline silicon | Emerging Cross-Sectional Technologies | 1 | Active |
| US8793853B2 | Core wire holder for producing polycrystalline silicon and method for producing polycrystalline silicon | Emerging Cross-Sectional Technologies | 1 | Active |
| US9006002B2 | Polycrystalline silicon rod and method for manufacturing polycrystalline silicon rod | Electricity | 1 | Active |
| US10870581B2 | Reaction furnace for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, method for producing polycrystalline silicon, and polycrystalline silicon rod or polycrystalline silicon ingot | Performing Operations; Transporting | 0 | Active |
| US8328935B2 | Method of manufacturing polycrystalline silicon rod | Chemistry; Metallurgy | 0 | Active |
| US10800659B2 | Polycrystalline silicon rod, processing method for polycrystalline silicon rod, method for evaluating polycrystalline silicon rod, and method for producing FZ single crystal silicon | Chemistry; Metallurgy | 0 | Active |
| US9328429B2 | Method for evaluating degree of crystal orientation in polycrystalline silicon, selection method for polycrystalline silicon rods, and production method for single crystal silicon | Chemistry; Metallurgy | 0 | Active |
| US10066320B2 | Polycrystalline silicon, FZ single crystal silicon, and method for producing the same | Chemistry; Metallurgy | 0 | Active |
| US10584035B2 | Purification system of trichlorosilane and silicon crystal | Chemistry; Metallurgy | 0 | Active |
| US9416444B2 | Apparatus for producing polycrystalline silicon and method for producing polycrystalline silicon | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.