Inventor · Chigasaki, JP

Tetsuya Ikuta

39Patents
8h-index
23Co-inventors
75Inventor score

Filing activity: Jun 30, 1987 → Dec 8, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US4924807A Apparatus for chemical vapor deposition Electricity 42 Expired
US5244501A Apparatus for chemical vapor deposition Electricity 37 Expired
US4800105A Method of forming a thin film by chemical vapor deposition Chemistry; Metallurgy 28 Expired
US4849260A Method for selectively depositing metal on a substrate Electricity 27 Expired
US4994301A ACVD (chemical vapor deposition) method for selectively depositing metal on a substrate Emerging Cross-Sectional Technologies 26 Expired
US7476338B2 Phosphor and manufacturing method for the same, and light source Emerging Cross-Sectional Technologies 22 Expired
US5851589A Method for thermal chemical vapor deposition Chemistry; Metallurgy 20 Expired
US9006865B2 Epitaxial growth substrate, semiconductor device, and epitaxial growth method Electricity 9 Active
US8426893B2 Epitaxial substrate for electronic device and method of producing the same Electricity 8 Active
US7812516B2 Light-emitting device and manufacturing method thereof Electricity 7 Active
US8847203B2 Group III nitride epitaxial laminate substrate Electricity 5 Active
US11205739B2 Semiconductor light-emitting device and method of manufacturing the same Electricity 4 Active
US8410472B2 Epitaxial substrate for electronic device and method of producing the same Electricity 4 Active
US8253326B2 Light-emitting device and manufacturing method thereof Electricity 3 Active
US7476336B2 Phosphor and manufacturing method for the same, and light emitting device using the phosphor Chemistry; Metallurgy 2 Expired
US8124440B2 Solid-state imaging device and method for making the same, and manufacturing substrate for solid-state imaging device Electricity 2 Active
US10727303B2 Group III nitride epitaxial substrate and method for manufacturing the same Electricity 2 Active
US8469760B2 Light emitting device and method for producing same Electricity 1 Active
US7803286B2 Phosphor and manufacturing method for the same, and light source Emerging Cross-Sectional Technologies 1 Active
US8164254B2 Light-emitting device and manufacturing method thereof Electricity 1 Active
US7531389B2 Method of manufacturing semiconductor device Electricity 1 Active
US8710489B2 Epitaxial substrate for electronic device, in which current flows in lateral direction and method of producing the same Electricity 0 Active
US7878876B2 Light emitting device and method for producing same Electricity 0 Active
US7956536B2 Light emitting device and method for producing same Electricity 0 Active
US8049248B2 Semiconductor device including thyristor and method of manufacturing the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.