Yamato Tonegawa
17Patents
5h-index
23Co-inventors
66Inventor score
Filing activity: Mar 19, 2002 → Jan 20, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8034673B2 | Film formation method and apparatus for forming silicon-containing insulating film doped with metal | Electricity | 71 | Active |
| US7179334B2 | System and method for performing semiconductor processing on substrate being processed | Emerging Cross-Sectional Technologies | 7 | Expired |
| US7494943B2 | Method for using film formation apparatus | Emerging Cross-Sectional Technologies | 6 | Active |
| US10388511B2 | Method of forming silicon nitride film, film forming apparatus and storage medium | Electricity | 6 | Active |
| US7964516B2 | Film formation apparatus for semiconductor process and method for using same | Emerging Cross-Sectional Technologies | 5 | Active |
| US8080109B2 | Film formation apparatus and method for using the same | Emerging Cross-Sectional Technologies | 4 | Active |
| US7938080B2 | Method for using film formation apparatus | Emerging Cross-Sectional Technologies | 4 | Active |
| US11694890B2 | Substrate processing method and substrate processing apparatus | Electricity | 1 | Active |
| US10535501B2 | Film forming apparatus, film forming method and non-transitory storage medium | Electricity | 1 | Active |
| US7959737B2 | Film formation apparatus and method for using the same | Emerging Cross-Sectional Technologies | 0 | Active |
| US10217630B2 | Method of forming silicon-containing film | Electricity | 0 | Active |
| US12060640B2 | Film forming method and system | Electricity | 0 | Active |
| US12237167B2 | Deposition method | Electricity | 0 | Active |
| US10573514B2 | Method of forming silicon-containing film | Electricity | 0 | Active |
| US8153451B2 | System and method for performing semiconductor processing on target substrate | Emerging Cross-Sectional Technologies | 0 | Active |
| US11923177B2 | Plasma processing apparatus and plasma processing method | Electricity | 0 | Active |
| US11781219B2 | Processing apparatus and processing method | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.