Inventor · San Jose, CA, US

Young S. Lee

33Patents
16h-index
57Co-inventors
84Inventor score

Filing activity: Nov 2, 1993 → Jul 16, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US7678715B2 Low wet etch rate silicon nitride film Electricity 499 Active
US7967913B2 Remote plasma clean process with cycled high and low pressure clean steps Chemistry; Metallurgy 459 Active
US8450191B2 Polysilicon films by HDP-CVD Electricity 455 Active
US9412581B2 Low-K dielectric gapfill by flowable deposition Electricity 379 Active
US8642481B2 Dry-etch for silicon-and-nitrogen-containing films Electricity 186 Active
US9064816B2 Dry-etch for selective oxidation removal Electricity 185 Active
US8808563B2 Selective etch of silicon by way of metastable hydrogen termination Electricity 184 Active
US9093390B2 Conformal oxide dry etch Electricity 184 Active
US8679982B2 Selective suppression of dry-etch rate of materials containing both silicon and oxygen Electricity 183 Active
US8801952B1 Conformal oxide dry etch Electricity 183 Active
US8679983B2 Selective suppression of dry-etch rate of materials containing both silicon and nitrogen Electricity 182 Active
US8771536B2 Dry-etch for silicon-and-carbon-containing films Electricity 181 Active
US9236266B2 Dry-etch for silicon-and-carbon-containing films Electricity 151 Active
US9418858B2 Selective etch of silicon by way of metastable hydrogen termination Electricity 137 Active
US7910491B2 Gapfill improvement with low etch rate dielectric liners Electricity 86 Active
US7524750B2 Integrated process modulation (IPM) a novel solution for gapfill with HDP-CVD Electricity 39 Active
US5424107A Reinforced corner structure for cloth Emerging Cross-Sectional Technologies 15 Expired
US7740706B2 Gas baffle and distributor for semiconductor processing chamber Electricity 13 Active
US7745350B2 Impurity control in HDP-CVD DEP/ETCH/DEP processes Electricity 10 Active
US7799704B2 Gas baffle and distributor for semiconductor processing chamber Chemistry; Metallurgy 9 Active
US7229931B2 Oxygen plasma treatment for enhanced HDP-CVD gapfill Electricity 8 Expired
US7766510B2 Cooling structure for street lamp using light emitting diode Emerging Cross-Sectional Technologies 7 Active
US7972968B2 High density plasma gapfill deposition-etch-deposition process etchant Electricity 6 Active
US7651587B2 Two-piece dome with separate RF coils for inductively coupled plasma reactors Electricity 6 Expired
US7704897B2 HDP-CVD SiON films for gap-fill Electricity 5 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.