Alexander Straaijer
83Patents
25h-index
63Co-inventors
91Inventor score
Filing activity: Dec 21, 1994 → Dec 9, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6952253B2 | Lithographic apparatus and device manufacturing method | Physics | 706 | Expired |
| US7199858B2 | Lithographic apparatus and device manufacturing method | Physics | 298 | Expired |
| US7075616B2 | Lithographic apparatus and device manufacturing method | Physics | 283 | Expired |
| US6020964A | Interferometer system and lithograph apparatus including an interferometer system | Physics | 213 | Expired |
| US7213963B2 | Lithographic apparatus and device manufacturing method | Physics | 160 | Expired |
| US7352434B2 | Lithographic apparatus and device manufacturing method | Physics | 134 | Expired |
| US7388648B2 | Lithographic projection apparatus | Physics | 115 | Expired |
| US7110081B2 | Lithographic apparatus and device manufacturing method | Physics | 105 | Expired |
| US7224436B2 | Lithographic apparatus and device manufacturing method | Physics | 99 | Expired |
| US7593093B2 | Lithographic apparatus and device manufacturing method | Physics | 69 | Active |
| US7372541B2 | Lithographic apparatus and device manufacturing method | Physics | 67 | Expired |
| US7038760B2 | Lithographic apparatus and device manufacturing method | Physics | 65 | Expired |
| US8797554B2 | Determining a structural parameter and correcting an asymmetry property | Physics | 56 | Active |
| US7593092B2 | Lithographic apparatus and device manufacturing method | Physics | 56 | Active |
| US7701577B2 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Physics | 50 | Active |
| US8115926B2 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell, and device manufacturing method to measure a property of a substrate | Physics | 49 | Active |
| US7738074B2 | Lithographic apparatus and device manufacturing method | Physics | 46 | Expired |
| US8792096B2 | Inspection apparatus for lithography | Physics | 44 | Active |
| US8681312B2 | Inspection apparatus for lithography | Physics | 43 | Active |
| US8692994B2 | Inspection method and apparatus, and associated computer readable product | Physics | 43 | Active |
| US5602683A | Lens system with lens elements arranged in a gas-filled holder and photolithographic apparatus including such a system | Physics | 36 | Expired |
| US8482845B2 | Lithographic apparatus and device manufacturing method | Physics | 30 | Active |
| US7317507B2 | Lithographic apparatus and device manufacturing method | Physics | 28 | Expired |
| US6084673A | Lithographic apparatus for step-and-scan imaging of mask pattern with interferometer mirrors on the mask and wafer holders | Physics | 27 | Expired |
| US7936444B2 | Lithographic apparatus and device manufacturing method | Physics | 26 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.