Brian H. Burrows
29Patents
8h-index
66Co-inventors
78Inventor score
Filing activity: May 9, 1997 → Oct 6, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7976631B2 | Multi-gas straight channel showerhead | Emerging Cross-Sectional Technologies | 224 | Active |
| US6145673A | Wafer transfer cassette | Electricity | 39 | Expired |
| US5878099A | Apparatus for performing work in a nuclear reactor | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7704327B2 | High temperature anneal with improved substrate support | Chemistry; Metallurgy | 12 | Expired |
| US8481118B2 | Multi-gas straight channel showerhead | Emerging Cross-Sectional Technologies | 9 | Active |
| US8183132B2 | Methods for fabricating group III nitride structures with a cluster tool | Electricity | 9 | Active |
| US7976634B2 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | Emerging Cross-Sectional Technologies | 8 | Active |
| US5864595A | Actuator for facilitating performance of work in a nuclear reactor | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6807972B2 | Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber | Emerging Cross-Sectional Technologies | 7 | Expired |
| US8663390B2 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | Emerging Cross-Sectional Technologies | 6 | Active |
| US9644267B2 | Multi-gas straight channel showerhead | Emerging Cross-Sectional Technologies | 5 | Active |
| US9267205B1 | Fastener system for supporting a liner plate in a gas showerhead reactor | Chemistry; Metallurgy | 3 | Active |
| US8657994B2 | System and method for improved epitaxial lift off | Emerging Cross-Sectional Technologies | 3 | Active |
| US9381731B2 | Epitaxial lift off systems and methods | Emerging Cross-Sectional Technologies | 2 | Active |
| US10932323B2 | Reflector and susceptor assembly for chemical vapor deposition reactor | Chemistry; Metallurgy | 1 | Active |
| US12037701B2 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Chemistry; Metallurgy | 0 | Active |
| US11117194B2 | Additive manufacturing having energy beam and lamp array | Emerging Cross-Sectional Technologies | 0 | Active |
| US11492704B2 | Chamber injector | Chemistry; Metallurgy | 0 | Active |
| US12334341B2 | Chamber body feedthrough for in chamber resistive heating element | Electricity | 0 | Active |
| US12324061B2 | Epitaxial deposition chamber | Electricity | 0 | Active |
| US9142707B2 | System and method for improved epitaxial lift off | Emerging Cross-Sectional Technologies | 0 | Active |
| US11189508B2 | Purged viewport for quartz dome in epitaxy reactor | Physics | 0 | Active |
| US10259206B2 | Epitaxial lift off systems and methods | Emerging Cross-Sectional Technologies | 0 | Active |
| US12188148B2 | Multi-layer EPI chamber body | Electricity | 0 | Active |
| US11807931B2 | Chamber injector | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.