Inventor · Dashulong, TW

Chun-Lin Chang

60Patents
4h-index
58Co-inventors
69Inventor score

Filing activity: Dec 20, 2000 → Apr 26, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US8404572B2 Multi-zone temperature control for semiconductor wafer Emerging Cross-Sectional Technologies 36 Active
US8309444B2 System and method of dosage profile control Electricity 7 Active
US6644091B2 Lower die for a bending machine Performing Operations; Transporting 6 Expired
US10524345B2 Residual gain monitoring and reduction for EUV drive laser Electricity 6 Active
US9042509B2 Liquid crystal display and bidirectional shift register device thereof Physics 4 Active
US10113233B2 Multi-zone temperature control for semiconductor wafer Emerging Cross-Sectional Technologies 4 Active
US10718718B2 EUV vessel inspection method and related system Electricity 3 Active
US10429729B2 EUV radiation modification methods and systems Physics 3 Active
US10429314B2 EUV vessel inspection method and related system Electricity 2 Active
US9324910B2 Light emitting diode Electricity 2 Active
US9023664B2 Multi-zone temperature control for semiconductor wafer Emerging Cross-Sectional Technologies 2 Active
US10917959B2 EUV radiation modification methods and systems Physics 2 Active
US11452197B2 Shock wave visualization for extreme ultraviolet plasma optimization Electricity 2 Active
US9105591B2 Rotatable and tunable heaters for semiconductor furnace Electricity 2 Active
US11720035B2 Mitigating long-term energy decay of laser devices Physics 1 Active
US11675272B2 Method and apparatus for mitigating contamination Electricity 1 Active
US11437161B1 Lithography apparatus and method for using the same Electricity 1 Active
US9006676B2 Apparatus for monitoring ion implantation Electricity 1 Active
US10980100B2 Residual gain monitoring and reduction for EUV drive laser Electricity 1 Active
US11800626B2 Shock wave visualization for extreme ultraviolet plasma optimization Electricity 1 Active
US11419203B2 EUV radiation modification methods and systems Physics 1 Active
US10509311B1 Apparatus and method for generating an electromagnetic radiation Electricity 1 Active
US11212903B2 Apparatus and method for generating extreme ultraviolet radiation Electricity 1 Active
US10852191B2 Light source system and polarization angle adjusting method Electricity 1 Active
US12009177B2 Detection using semiconductor detector Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.