Inventor · Ome, JP

Dai Ishikawa

49Patents
15h-index
57Co-inventors
84Inventor score

Filing activity: Feb 19, 1999 → Sep 16, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US9029272B1 Method for treating SiOCH film with hydrogen plasma Electricity 506 Active
US8785215B2 Method for repairing damage of dielectric film by cyclic processes Electricity 504 Active
US8664627B1 Method for supplying gas with flow rate gradient over substrate Emerging Cross-Sectional Technologies 502 Active
US9190263B2 Method for forming SiOCH film using organoaminosilane annealing Electricity 501 Active
US9754779B1 Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches Electricity 464 Active
US9353441B2 Heating/cooling pedestal for semiconductor-processing apparatus Electricity 449 Active
US9478414B2 Method for hydrophobization of surface of silicon-containing film by ALD Electricity 448 Active
US10014212B2 Selective deposition of metallic films Electricity 374 Active
US10468251B2 Method for forming spacers using silicon nitride film for spacer-defined multiple patterning Electricity 360 Active
US10529554B2 Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches Electricity 359 Active
US9803277B1 Reaction chamber passivation and selective deposition of metallic films Electricity 74 Active
US6388951B1 Audio apparatus Physics 71 Expired
US9805974B1 Selective deposition of metallic films Electricity 52 Active
US10041166B2 Reaction chamber passivation and selective deposition of metallic films Electricity 51 Active
US10480064B2 Reaction chamber passivation and selective deposition of metallic films Electricity 43 Active
US10793946B1 Reaction chamber passivation and selective deposition of metallic films Electricity 15 Active
US10410857B2 Formation of SiN thin films Electricity 12 Active
US7211497B2 Method for fabricating semiconductor devices Electricity 6 Expired
US7262101B2 Method of manufacturing a semiconductor integrated circuit device Electricity 2 Expired
US6462263B2 Information recording medium and reproducing apparatus therefor Physics 2 Expired
US6794257B2 Method of manufacturing a semiconductor integrated circuit device Electricity 2 Expired
US11133181B2 Formation of SiN thin films Electricity 2 Active
US8304654B2 Coaxial cable Chemistry; Metallurgy 1 Active
US8852463B2 Metal fine particle for conductive metal paste, conductive metal paste and metal film Emerging Cross-Sectional Technologies 1 Active
US10910262B2 Method of selectively depositing a capping layer structure on a semiconductor device structure Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.