Inventor · Hopewell Junction, NY, US

Daniel Prager

21Patents
8h-index
22Co-inventors
67Inventor score

Filing activity: Dec 12, 2003 → Mar 31, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US7126700B2 Parametric optimization of optical metrology model Physics 34 Expired
US7894927B2 Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models for metal-gate structures Electricity 19 Active
US7713758B2 Method and apparatus for optimizing a gate channel Electricity 15 Active
US7967995B2 Multi-layer/multi-input/multi-output (MLMIMO) models and method for using Electricity 15 Active
US7328418B2 Iso/nested control for soft mask processing Electricity 14 Expired
US7209798B2 Iso/nested cascading trim control with model feedback updates Electricity 11 Expired
US8019458B2 Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures Emerging Cross-Sectional Technologies 10 Active
US7899637B2 Method and apparatus for creating a gate optimization evaluation library Electricity 9 Active
US7502709B2 Dynamic metrology sampling for a dual damascene process Electricity 8 Active
US7765077B2 Method and apparatus for creating a Spacer-Optimization (S-O) library Electricity 8 Active
US7487053B2 Refining a virtual profile library Physics 7 Active
US7939450B2 Method and apparatus for spacer-optimization (S-O) Electricity 7 Active
US7305322B2 Using a virtual profile library Physics 5 Expired
US7567700B2 Dynamic metrology sampling with wafer uniformity control Physics 5 Active
US7395132B2 Optical metrology model optimization for process control Physics 5 Active
US7289864B2 Feature dimension deviation correction system, method and program product Electricity 4 Expired
US8183062B2 Creating metal gate structures using Lithography-Etch-Lithography-Etch (LELE) processing sequences Physics 3 Active
US7542859B2 Creating a virtual profile library Physics 2 Active
US8532796B2 Contact processing using multi-input/multi-output (MIMO) models Electricity 1 Active
US8501628B2 Differential metal gate etching process Electricity 1 Active
US7502660B2 Feature dimension deviation correction system, method and program product Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.