Daniel Prager
21Patents
8h-index
22Co-inventors
67Inventor score
Filing activity: Dec 12, 2003 → Mar 31, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7126700B2 | Parametric optimization of optical metrology model | Physics | 34 | Expired |
| US7894927B2 | Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models for metal-gate structures | Electricity | 19 | Active |
| US7713758B2 | Method and apparatus for optimizing a gate channel | Electricity | 15 | Active |
| US7967995B2 | Multi-layer/multi-input/multi-output (MLMIMO) models and method for using | Electricity | 15 | Active |
| US7328418B2 | Iso/nested control for soft mask processing | Electricity | 14 | Expired |
| US7209798B2 | Iso/nested cascading trim control with model feedback updates | Electricity | 11 | Expired |
| US8019458B2 | Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures | Emerging Cross-Sectional Technologies | 10 | Active |
| US7899637B2 | Method and apparatus for creating a gate optimization evaluation library | Electricity | 9 | Active |
| US7502709B2 | Dynamic metrology sampling for a dual damascene process | Electricity | 8 | Active |
| US7765077B2 | Method and apparatus for creating a Spacer-Optimization (S-O) library | Electricity | 8 | Active |
| US7487053B2 | Refining a virtual profile library | Physics | 7 | Active |
| US7939450B2 | Method and apparatus for spacer-optimization (S-O) | Electricity | 7 | Active |
| US7305322B2 | Using a virtual profile library | Physics | 5 | Expired |
| US7567700B2 | Dynamic metrology sampling with wafer uniformity control | Physics | 5 | Active |
| US7395132B2 | Optical metrology model optimization for process control | Physics | 5 | Active |
| US7289864B2 | Feature dimension deviation correction system, method and program product | Electricity | 4 | Expired |
| US8183062B2 | Creating metal gate structures using Lithography-Etch-Lithography-Etch (LELE) processing sequences | Physics | 3 | Active |
| US7542859B2 | Creating a virtual profile library | Physics | 2 | Active |
| US8532796B2 | Contact processing using multi-input/multi-output (MIMO) models | Electricity | 1 | Active |
| US8501628B2 | Differential metal gate etching process | Electricity | 1 | Active |
| US7502660B2 | Feature dimension deviation correction system, method and program product | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.