Inventor · Dallas, TX, US

Deepak A. Ramappa

47Patents
6h-index
47Co-inventors
69Inventor score

Filing activity: Sep 28, 2001 → Feb 1, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US7443189B2 Method to detect and predict metal silicide defects in a microelectronic device during the manufacture of an integrated circuit Physics 79 Expired
US6607927B2 Method and apparatus for monitoring in-line copper contamination Electricity 31 Expired
US6869873B2 Copper silicide passivation for improved reliability Electricity 16 Expired
US7767583B2 Method to improve uniformity of chemical mechanical polishing planarization Electricity 14 Active
US7772867B2 Structures for testing and locating defects in integrated circuits Electricity 9 Active
US8153496B1 Self-aligned process and method for fabrication of high efficiency solar cells Emerging Cross-Sectional Technologies 7 Active
US8815634B2 Dark currents and reducing defects in image sensors and photovoltaic junctions Emerging Cross-Sectional Technologies 6 Active
US7868306B2 Thermal modulation of implant process Electricity 6 Active
US6812050B1 System and method of evaluating gate oxide integrity for semiconductor microchips Physics 5 Expired
US7268073B2 Post-polish treatment for inhibiting copper corrosion Electricity 5 Expired
US8614143B2 Simultaneous via and trench patterning using different etch rates Electricity 5 Active
US7200498B2 System for remediating cross contamination in semiconductor manufacturing processes Emerging Cross-Sectional Technologies 5 Expired
US10131757B2 Methods for surface modification of materials Chemistry; Metallurgy 4 Active
US7601629B2 Semiconductive device fabricated using subliming materials to form interlevel dielectrics Electricity 4 Expired
US8507298B2 Patterned implant of a dielectric layer Emerging Cross-Sectional Technologies 4 Active
US8187979B2 Workpiece patterning with plasma sheath modulation Emerging Cross-Sectional Technologies 3 Active
US8603900B2 Reducing surface recombination and enhancing light trapping in solar cells Emerging Cross-Sectional Technologies 3 Active
US7228193B2 Methods for detecting structure dependent process defects Physics 3 Expired
US8937004B2 Apparatus and method for controllably implanting workpieces Emerging Cross-Sectional Technologies 2 Active
US7312151B2 System for ultraviolet atmospheric seed layer remediation Electricity 2 Expired
US8461032B2 Use of dopants with different diffusivities for solar cell manufacture Emerging Cross-Sectional Technologies 2 Active
US8716155B2 Method to enhance charge trapping Electricity 2 Active
US8465909B2 Self-aligned masking for solar cell manufacture Emerging Cross-Sectional Technologies 2 Active
US8283265B2 Method to enhance charge trapping Electricity 2 Active
US7902091B2 Cleaving of substrates Electricity 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.