Inventor · Santa Clara, CA, US

John Drewery

70Patents
19h-index
74Co-inventors
87Inventor score

Filing activity: May 6, 1998 → Jun 6, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US6790773B1 Process for forming barrier/seed structures for integrated circuits Electricity 96 Expired
US9583357B1 Systems and methods for reverse pulsing Electricity 90 Active
US7449098B1 Method for planar electroplating Electricity 86 Expired
US9761459B2 Systems and methods for reverse pulsing Electricity 85 Active
US6287435A Method and apparatus for ionized physical vapor deposition Electricity 77 Expired
US6080287A Method and apparatus for ionized physical vapor deposition Electricity 73 Expired
US7211509B1 Method for enhancing the nucleation and morphology of ruthenium films on dielectric substrates using amine containing compounds Electricity 50 Expired
US6525407B1 Integrated circuit package Emerging Cross-Sectional Technologies 38 Expired
US6197165A Method and apparatus for ionized physical vapor deposition Electricity 38 Expired
US6417626B1 Immersed inductively—coupled plasma source Electricity 27 Expired
US6743661B1 Method of fabricating an integrated circuit package utilizing an interposer surrounded by a flexible dielectric material with conductive posts Emerging Cross-Sectional Technologies 27 Expired
US6719886B2 Method and apparatus for ionized physical vapor deposition Electricity 24 Expired
US7682498B1 Rotationally asymmetric variable electrode correction Chemistry; Metallurgy 22 Active
US7449099B1 Selectively accelerated plating of metal features Electricity 22 Expired
US7405163B1 Selectively accelerated plating of metal features Electricity 22 Active
US8728958B2 Gap fill integration Electricity 22 Active
US6709565B2 Method and apparatus for uniform electropolishing of damascene ic structures by selective agitation Electricity 21 Expired
US6620736B2 Electrostatic control of deposition of, and etching by, ionized materials in semiconductor processing Electricity 21 Expired
US6756307B1 Apparatus for electrically planarizing semiconductor wafers Electricity 20 Expired
US6774039B1 Process scheme for improving electroplating performance in integrated circuit manufacture Electricity 19 Expired
US6764168B1 Sensor for detecting droplet characteristics Performing Operations; Transporting 16 Expired
US6537421B2 RF bias control in plasma deposition and etch systems with multiple RF power sources Electricity 16 Expired
US7799200B1 Selective electrochemical accelerator removal Electricity 15 Active
US7531079B1 Method and apparatus for uniform electropolishing of damascene IC structures by selective agitation Electricity 15 Active
US6652711B2 Inductively-coupled plasma processing system Electricity 15 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.