Inventor · San Jose, CA, US

Jonghoon Baek

24Patents
8h-index
57Co-inventors
74Inventor score

Filing activity: Mar 24, 2010 → Mar 10, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US8969212B2 Dry-etch selectivity Electricity 182 Active
US8312839B2 Mixing frequency at multiple feeding points Electricity 154 Active
US9384997B2 Dry-etch selectivity Electricity 145 Active
US9373517B2 Semiconductor processing with DC assisted RF power for improved control Electricity 135 Active
US10032606B2 Semiconductor processing with DC assisted RF power for improved control Electricity 94 Active
US9593421B2 Particle generation suppressor by DC bias modulation Electricity 55 Active
US9892888B2 Particle generation suppresor by DC bias modulation Electricity 23 Active
US9039864B2 Off-center ground return for RF-powered showerhead Emerging Cross-Sectional Technologies 11 Active
US9888554B2 System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector Electricity 6 Active
US10504697B2 Particle generation suppresor by DC bias modulation Electricity 5 Active
US9068262B2 Tightly fitted ceramic insulator on large area electrode Emerging Cross-Sectional Technologies 4 Active
US10362664B2 System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector Electricity 2 Active
US11339475B2 Film stack overlay improvement Electricity 1 Active
US11347154B2 Cleaning a structure surface in an EUV chamber Electricity 1 Active
US8875657B2 Balancing RF bridge assembly Chemistry; Metallurgy 1 Active
US11908662B2 Device and method for tuning plasma distribution using phase control Electricity 0 Active
US11264482B2 Semiconductor device including dummy gate patterns and manufacturing method thereof Electricity 0 Active
US9850576B2 Anti-arc zero field plate Electricity 0 Active
US10477662B2 System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector Electricity 0 Active
US12189313B2 Cleaning a structure surface in an EUV chamber Electricity 0 Active
US11013096B2 System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector Electricity 0 Active
US12136536B2 Electrostatic chuck with multiple radio frequency meshes to control plasma uniformity Electricity 0 Active
US12432972B2 Semiconductor device Electricity 0 Active
US9827578B2 Tightly fitted ceramic insulator on large area electrode Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.