Katsuhiko Komori
14Patents
4h-index
21Co-inventors
60Inventor score
Filing activity: Jun 6, 1996 → Dec 22, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8945339B2 | Film formation apparatus | Electricity | 466 | Active |
| US7648895B2 | Vertical CVD apparatus for forming silicon-germanium film | Chemistry; Metallurgy | 321 | Active |
| US5695528A | Treating agent for cellulosic textile material and process for treating cellulosic textile material | Textiles; Paper | 19 | Expired |
| US7273818B2 | Film formation method and apparatus for semiconductor process | Electricity | 4 | Expired |
| US9758865B2 | Silicon film forming method, thin film forming method and cross-sectional shape control method | Electricity | 4 | Active |
| US9558940B2 | Method and apparatus for forming silicon film | Electricity | 1 | Active |
| US9798317B2 | Substrate processing method and control apparatus | Electricity | 1 | Active |
| US9005459B2 | Film deposition method and film deposition apparatus | Electricity | 1 | Active |
| US9318328B2 | Method and apparatus for forming silicon film | Electricity | 0 | Active |
| US9490139B2 | Method and apparatus for forming silicon film | Electricity | 0 | Active |
| US9984875B2 | Film forming method | Electricity | 0 | Active |
| US9799577B2 | Heat treatment system, heat treatment method, and program | Electricity | 0 | Active |
| US9384974B2 | Trench filling method and processing apparatus | Electricity | 0 | Active |
| US10570508B2 | Film forming apparatus, film forming method and heat insulating member | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.