Inventor · Seoul, KR

Katsushi Kishimoto

31Patents
8h-index
25Co-inventors
75Inventor score

Filing activity: Jun 11, 1999 → Oct 12, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US6242686A Photovoltaic device and process for producing the same Emerging Cross-Sectional Technologies 73 Expired
US6525264B2 Thin-film solar cell module Emerging Cross-Sectional Technologies 33 Expired
US6383898B1 Method for manufacturing photoelectric conversion device Emerging Cross-Sectional Technologies 33 Expired
US7032536B2 Thin film formation apparatus including engagement members for support during thermal expansion Electricity 12 Expired
US9246377B2 Apparatus for transferring substrate Electricity 10 Active
US8137046B2 Substrate transfer apparatus and substrate transfer method Electricity 9 Active
US7979166B2 Generation facility management system Emerging Cross-Sectional Technologies 9 Active
US7927455B2 Plasma processing apparatus Electricity 8 Active
US8092640B2 Plasma processing apparatus and semiconductor device manufactured by the same apparatus Electricity 7 Expired
US7540257B2 Plasma processing apparatus and semiconductor device manufactured by the same apparatus Electricity 6 Active
US9543444B2 Oxide sputtering target, and thin film transistor using the same Electricity 6 Active
US7195673B2 Plasma CVD apparatus, and method for forming film and method for forming semiconductor device using the same Chemistry; Metallurgy 5 Expired
US6979589B2 Silicon-based thin-film photoelectric conversion device and method of manufacturing thereof Emerging Cross-Sectional Technologies 5 Expired
US7918939B2 Semiconductor manufacturing apparatus and semiconductor manufacturing method using the same Emerging Cross-Sectional Technologies 2 Active
US7565880B2 Plasma CVD apparatus, and method for forming film and method for forming semiconductor device using the same Chemistry; Metallurgy 2 Active
US9799712B2 Method of manufacturing light-emitting display device with reduced pressure drying Electricity 2 Active
US9530622B2 Sputtering device and gas supply pipe for sputtering device Electricity 1 Active
US11211576B2 Organic light emitting device and method of manufacturing the same Electricity 0 Active
US9644270B2 Oxide semiconductor depositing apparatus and method of manufacturing oxide semiconductor using the same Electricity 0 Active
US8389389B2 Semiconductor layer manufacturing method, semiconductor layer manufacturing apparatus, and semiconductor device manufactured using such method and apparatus Emerging Cross-Sectional Technologies 0 Active
US10032927B2 Oxide sputtering target, and thin film transistor using the same Electricity 0 Active
US10032922B2 Thin-film transistor with crystallized active layer, method of manufacturing the same, and organic light-emitting display device including the same Electricity 0 Active
US9484200B2 Oxide sputtering target, thin film transistor using the same, and method for manufacturing thin film transistor Electricity 0 Active
US8395250B2 Plasma processing apparatus with an exhaust port above the substrate Electricity 0 Active
US11264571B2 Bake system and method of fabricating display device using the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.