Katsuyoshi Harada
42Patents
6h-index
42Co-inventors
69Inventor score
Filing activity: Sep 26, 1990 → Jan 12, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5985229A | Solid silica derivative and process for producing the same | Chemistry; Metallurgy | 26 | Expired |
| US5362897A | Process for producing trialkoxysilanes | Chemistry; Metallurgy | 18 | Expired |
| US9443718B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Electricity | 11 | Active |
| US5221412A | Vapor-phase epitaxial growth process by a hydrogen pretreatment step followed by decomposition of disilane to form monocrystalline Si film | Emerging Cross-Sectional Technologies | 10 | Expired |
| US10040884B2 | Ethylene/α-olefin copolymers and lubricating oils | Chemistry; Metallurgy | 8 | Active |
| US9620357B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 6 | Active |
| US5260471A | Process for producing trialkoxysilane | Emerging Cross-Sectional Technologies | 6 | Expired |
| US10340134B2 | Semiconductor device manufacturing method, substrate processing apparatus, and recording medium | Electricity | 4 | Active |
| US10770287B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 4 | Active |
| US10329366B2 | Ethylene/α-olefin copolymers and lubricating oils | Chemistry; Metallurgy | 4 | Active |
| US9190298B2 | Film forming method and recording medium for performing the method | Electricity | 3 | Active |
| US11527402B2 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Electricity | 2 | Active |
| US10490400B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 2 | Active |
| US10604842B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 1 | Active |
| US9741555B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 1 | Active |
| US7005532B2 | Process of producing alkoxysilanes | Chemistry; Metallurgy | 1 | Expired |
| US11961733B2 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Electricity | 1 | Active |
| US9520282B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 1 | Active |
| US6664224B2 | Quaternary ammonium salt and process for the preparation thereof | Human Necessities | 1 | Expired |
| US9472397B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 1 | Active |
| US6796874B2 | Toy vehicle with shock absorbing steering mechanism | Human Necessities | 1 | Expired |
| US7976807B2 | Method for detoxifying HCD gas and apparatus therefor | Performing Operations; Transporting | 1 | Active |
| US5556999A | Alkoxysilane composition inhibited from disproportionation reaction | Chemistry; Metallurgy | 1 | Expired |
| US10607833B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 1 | Active |
| US9607827B2 | Method of manufacturing semiconductor device, and recording medium | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.