Inventor · Shinagawa, JP

Kazumichi Tsumura

17Patents

5h-index

14Co-inventors

59Inventor score

Filing activity: Apr 28, 2004 → Aug 28, 2017

Most-cited inventions

Patent	Title	Area	Cited by	Status
US10074667B1	Semiconductor memory device	Electricity	117	Active
US8435887B2	Copper interconnect formation	Electricity	31	Active
US7115999B2	Semiconductor device and method of manufacturing the same	Electricity	12	Expired
US8716134B2	Interconnect structure employing a Mn-group VIIIB alloy liner	Electricity	7	Active
US7795733B2	Semiconductor device having aerial wiring and manufacturing method thereof	Electricity	6	Active
US7687910B2	Semiconductor device and method of fabricating the same	Electricity	3	Active
US8772942B2	Interconnect structure employing a Mn-group VIIIB alloy liner	Electricity	2	Active
US7470609B2	Semiconductor device and method for manufacturing the same	Electricity	2	Active
US8963319B2	Semiconductor chip with through hole vias	Electricity	2	Active
US7205664B2	Semiconductor device and method for manufacturing the same	Electricity	1	Expired
US9099443B2	Semiconductor device and manufacturing method thereof	Electricity	1	Active
US7638829B2	Capacitor of dynamic random access memory and method of manufacturing the capacitor	Electricity	1	Active
US7786523B2	Capacitor of dynamic random access memory and method of manufacturing the capacitor	Electricity	1	Active
US8754532B2	Semiconductor device and manufacturing method thereof	Electricity	1	Active
US8377822B2	Semiconductor device and manufacturing method thereof	Electricity	0	Active
US10068775B2	Method of bonding supporting substrate with device substrate for fabricating semiconductor device	Electricity	0	Active
US8008186B2	Semiconductor device and method of fabricating the same	Electricity	0	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.