Inventor · Ludwigshafen, DE

Max Siebert

16Patents
2h-index
36Co-inventors
46Inventor score

Filing activity: Feb 7, 2014 → Dec 16, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US10385236B2 Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates Electricity 2 Active
US9138381B2 Production of inorganic-organic composite materials by reactive spray-drying Performing Operations; Transporting 2 Active
US10072326B2 Versatile holder for treating the surface of rod-shaped substrates Electricity 2 Active
US10899945B2 Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt comprising substrates Electricity 2 Active
US11590528B2 Tool fixture for multiple process steps Emerging Cross-Sectional Technologies 1 Active
USD881242S1 Tool holder General 1 Active
US10844325B2 Composition for post chemical-mechanical-polishing cleaning Chemistry; Metallurgy 0 Active
US11264250B2 Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates Chemistry; Metallurgy 0 Active
US10738219B2 Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates Chemistry; Metallurgy 0 Active
US11993729B2 Chemical mechanical polishing composition Electricity 0 Active
US11286402B2 Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates Electricity 0 Active
US10570316B2 Chemical mechanical polishing (CMP) composition Chemistry; Metallurgy 0 Active
US10844333B2 Composition for post chemical-mechanical-polishing cleaning Chemistry; Metallurgy 0 Active
US10227506B2 Chemical mechanical polishing (CMP) composition for high effective polishing of substrates comprising germanium Electricity 0 Active
US10865361B2 Composition for post chemical-mechanical-polishing cleaning Chemistry; Metallurgy 0 Active
US12241154B2 Holding system for holding substrates during a processing of the surfaces of the substrates Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.