Inventor · Burghausen, DE

Michael Kerstan

14Patents
5h-index
15Co-inventors
59Inventor score

Filing activity: May 25, 1999 → Feb 25, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US8113913B2 Method for the simultaneous grinding of a plurality of semiconductor wafers Performing Operations; Transporting 11 Active
US7867059B2 Semiconductor wafer, apparatus and process for producing the semiconductor wafer Performing Operations; Transporting 9 Active
US7077726B2 Semiconductor wafer with improved local flatness, and method for its production Emerging Cross-Sectional Technologies 7 Expired
US7815489B2 Method for the simultaneous double-side grinding of a plurality of semiconductor wafers Performing Operations; Transporting 7 Active
US6362487B1 Method and device for nondestructive detection of crystal defects Electricity 5 Expired
US9539695B2 Carrier, method for coating a carrier, and method for the simultaneous double-side material-removing machining of semiconductor wafers Emerging Cross-Sectional Technologies 2 Active
US8974267B2 Insert carrier and method for the simultaneous double-side material-removing processing of semiconductor wafers Performing Operations; Transporting 1 Active
US9011209B2 Method and apparatus for trimming the working layers of a double-side grinding apparatus Performing Operations; Transporting 1 Active
US8512099B2 Method for the simultaneous double-sided material removal processing of a plurality of semiconductor wafers Performing Operations; Transporting 1 Active
US10707069B2 Method for polishing a semiconductor wafer Electricity 0 Active
US8911281B2 Method for trimming the working layers of a double-side grinding apparatus Performing Operations; Transporting 0 Active
US8685270B2 Method for producing a semiconductor wafer Electricity 0 Active
US8986070B2 Method for trimming the working layers of a double-side grinding apparatus Performing Operations; Transporting 0 Active
US8529315B2 Method for producing a semiconductor wafer Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.