Inventor · Nuremberg, DE

Michael Vogel

17Patents
1h-index
12Co-inventors
47Inventor score

Filing activity: Aug 9, 2010 → Dec 20, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US8865324B2 Production method for a bulk SiC single crystal with a large facet and monocrystalline SiC substrate with homogeneous resistance distribution Emerging Cross-Sectional Technologies 7 Active
US8747982B2 Production method for an SiC volume monocrystal with a homogeneous lattice plane course and a monocrystalline SiC substrate with a homogeneous lattice plane course Emerging Cross-Sectional Technologies 1 Active
US11236438B2 Silicon carbide substrate and method of growing SiC single crystal boules Chemistry; Metallurgy 1 Active
US12195878B2 SiC crystals with an optimal orientation of lattice planes for fissure reduction and method of producing same Chemistry; Metallurgy 0 Active
US9590046B2 Monocrystalline SiC substrate with a non-homogeneous lattice plane course Emerging Cross-Sectional Technologies 0 Active
US11261536B2 Production method and growth arrangement for producing a bulk SiC single crystal by arranging at least two insulation cylinder components to control a variation in a volume element density Chemistry; Metallurgy 0 Active
US8758510B2 Production method for an SiC volume monocrystal with a non-homogeneous lattice plane course and a monocrystalline SiC substrate with a non-homogeneous lattice plane course Emerging Cross-Sectional Technologies 0 Active
US11560643B2 System for efficient manufacturing of a plurality of high-quality semiconductor single crystals by physical vapor transport Chemistry; Metallurgy 0 Active
US11624124B2 Silicon carbide substrate and method of growing SiC single crystal boules Emerging Cross-Sectional Technologies 0 Active
US11479875B2 System for horizontal growth of high-quality semiconductor single crystals by physical vapor transport Chemistry; Metallurgy 0 Active
US9732438B2 Method for producing a vanadium-doped silicon carbide volume monocrystal, and vanadium-doped silicon carbide substrate Electricity 0 Active
US11515140B2 Chamfered silicon carbide substrate and method of chamfering Emerging Cross-Sectional Technologies 0 Active
US11474283B2 Super resolution for magneto-optical microscopy Physics 0 Active
US9376764B2 Physical vapor transport growth system for simultaneously growing more than one SiC single crystal and method of growing Chemistry; Metallurgy 0 Active
US11041254B2 Chamfered silicon carbide substrate and method of chamfering Performing Operations; Transporting 0 Active
US12157955B2 Method for simultaneously manufacturing more than one single crystal of a semiconductor material by physical vapor transport Chemistry; Metallurgy 0 Active
US11781245B2 Silicon carbide substrate and method of growing SiC single crystal boules Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.