Naofumi Ohashi
99Patents
10h-index
58Co-inventors
81Inventor score
Filing activity: Jul 28, 1998 → Mar 21, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6184143A | Semiconductor integrated circuit device and fabrication process thereof | Electricity | 185 | Expired |
| US6326299A | Method for manufacturing a semiconductor device | Electricity | 42 | Expired |
| US7538038B2 | Method of removing resist, semiconductor device thereby and method of manufacturing a semiconductor device | Electricity | 27 | Expired |
| US6376345B1 | Process for manufacturing semiconductor integrated circuit device | Emerging Cross-Sectional Technologies | 26 | Expired |
| US6908847B2 | Method of manufacturing a semiconductor device having an interconnect embedded in an insulating film | Electricity | 23 | Expired |
| US6403459B1 | Fabrication process of semiconductor integrated circuit device | Electricity | 12 | Expired |
| US7053487B2 | Semiconductor device | Electricity | 11 | Expired |
| US6730590B2 | Semiconductor integrated circuit device and fabrication process thereof | Electricity | 11 | Expired |
| US6509273B1 | Method for manufacturing a semiconductor device | Electricity | 10 | Expired |
| US6561875B1 | Apparatus and method for producing substrate with electrical wire thereon | Performing Operations; Transporting | 10 | Expired |
| US6864169B2 | Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device | Electricity | 9 | Expired |
| US6638854B2 | Semiconductor device and method for manufacturing the same | Electricity | 8 | Expired |
| US6458674B1 | Process for manufacturing semiconductor integrated circuit device | Emerging Cross-Sectional Technologies | 8 | Expired |
| US9018689B1 | Substrate processing apparatus and method of manufacturing semiconductor device | Electricity | 7 | Active |
| US9431220B1 | Substrate processing apparatus and substrate processing system | Electricity | 6 | Active |
| US7659201B2 | Process for manufacturing semiconductor integrated circuit device | Emerging Cross-Sectional Technologies | 6 | Active |
| US6531400B2 | Process for manufacturing semiconductor integrated circuit device | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6716749B2 | Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device | Electricity | 5 | Expired |
| US7064060B2 | Method for manufacturing semiconductor device | Electricity | 5 | Expired |
| US6797609B2 | Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device | Electricity | 4 | Expired |
| US6800557B2 | Process for manufacturing semiconductor integrated circuit device | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6849535B2 | Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device | Electricity | 4 | Expired |
| US6756679B2 | Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device | Electricity | 3 | Expired |
| US7205030B2 | Method for forming porous film | Electricity | 3 | Expired |
| US9484249B1 | Method of manufacturing semiconductor device | Electricity | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.