Osamu Kasahara
31Patents
14h-index
97Co-inventors
84Inventor score
Filing activity: Dec 18, 1984 → Sep 25, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5498768A | Process for forming multilayer wiring | Emerging Cross-Sectional Technologies | 49 | Expired |
| US5060045A | Semiconductor integrated circuit device and method of manufacturing the same | Electricity | 45 | Expired |
| US7494941B2 | Manufacturing method of semiconductor device, and substrate processing apparatus | Emerging Cross-Sectional Technologies | 43 | Expired |
| US5734188A | Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same | Electricity | 37 | Expired |
| US4907046A | Semiconductor device with multilayer silicon oxide silicon nitride dielectric | Electricity | 29 | Expired |
| US4610774A | Target for sputtering | Electricity | 29 | Expired |
| US5202275A | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Emerging Cross-Sectional Technologies | 27 | Expired |
| US4606802A | Planar magnetron sputtering with modified field configuration | Electricity | 26 | Expired |
| US5331191A | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Emerging Cross-Sectional Technologies | 22 | Expired |
| US5917211A | Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same | Electricity | 21 | Expired |
| US5264712A | Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same | Electricity | 21 | Expired |
| US5670421A | Process for forming multilayer wiring | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5773340A | Method of manufacturing a BIMIS | Emerging Cross-Sectional Technologies | 17 | Expired |
| US5036192A | Rotary encoder using reflected light | Physics | 15 | Expired |
| US5059791A | Reference position detecting device utilizing a plurality of photo-detectors and an encoder using the device | Physics | 14 | Expired |
| US5780882A | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Emerging Cross-Sectional Technologies | 14 | Expired |
| US5739589A | Semiconductor integrated circuit device process for fabricating the same and apparatus for fabricating the same | Emerging Cross-Sectional Technologies | 11 | Expired |
| US6169324A | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6127255A | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6576063B2 | Apparatus and method for use in manufacturing a semiconductor device | Electricity | 6 | Expired |
| US5811316A | Method of forming teos oxide and silicon nitride passivation layer on aluminum wiring | Emerging Cross-Sectional Technologies | 5 | Expired |
| US5468989A | Semiconductor integrated circuit device having an improved vertical bipolar transistor structure | Electricity | 5 | Expired |
| US6548847B2 | SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING A FIRST WIRING STRIP EXPOSED THROUGH A CONNECTING HOLE, A TRANSITION-METAL FILM IN THE CONNECTING HOLE AND AN ALUMINUM WIRING STRIP THEREOVER, AND A TRANSITION-METAL NITRIDE FILM BETWEEN THE ALUMINUM WIRING STRIP AND THE TRANSITION-METAL FILM | Emerging Cross-Sectional Technologies | 5 | Expired |
| US5557147A | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Emerging Cross-Sectional Technologies | 5 | Expired |
| US6342412B1 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Emerging Cross-Sectional Technologies | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.