Inventor · Incheon, KR

Pan-Kwi Park

27Patents
4h-index
48Co-inventors
59Inventor score

Filing activity: Mar 10, 2009 → May 10, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US7704867B2 Method of manufacturing semiconductor devices Electricity 9 Active
US9129952B2 Semiconductor devices including a stressor in a recess and methods of forming the same Electricity 6 Active
US9257520B2 Semiconductor devices including a stressor in a recess and methods of forming the same Electricity 5 Active
US8907426B2 Semiconductor device having embedded strain-inducing pattern and method of forming the same Electricity 5 Active
US9502563B2 Semiconductor device having embedded strain-inducing pattern and method of forming the same Electricity 4 Active
US9985036B2 Semiconductor device having embedded strain-inducing pattern and method of forming the same Electricity 4 Active
US9768300B2 Semiconductor devices including a stressor in a recess and methods of forming the same Electricity 4 Active
US8502286B2 Etch stop layers and methods of forming the same Electricity 3 Active
US8227308B2 Method of fabricating semiconductor integrated circuit device Electricity 1 Active
US10312152B2 Field effect transistor with stacked nanowire-like channels and methods of manufacturing the same Electricity 1 Active
US7977257B2 Methods of manufacturing semiconductor devices Electricity 1 Active
US12021131B2 Semiconductor device Performing Operations; Transporting 1 Active
US8951853B1 Method of forming semiconductor device using Si-H rich silicon nitride layer Electricity 1 Active
US9548301B2 Semiconductor devices including a stressor in a recess and methods of forming the same Electricity 0 Active
US12142690B2 Semiconductor devices Electricity 0 Active
US8772173B2 Method of manufacturing semiconductor device Electricity 0 Active
US11990552B2 Semiconductor devices Electricity 0 Active
US12402400B2 Multi gate semiconductor device Electricity 0 Active
US9024385B2 Semiconductor devices including a stressor in a recess and methods of forming the same General 0 Revoked
US12289908B2 Semiconductor device having multi-bridge channel field-effect transistor including source/drain pattern with a plurality of semiconductor patterns Performing Operations; Transporting 0 Active
US12040402B2 Semiconductor device Electricity 0 Active
US11821106B2 Semiconductor process chamber including lower volume upper dome Electricity 0 Active
US10790133B2 Precleaning apparatus and substrate processing system Electricity 0 Active
US9324834B2 Semiconductor device having embedded strain-inducing pattern and method of forming the same Electricity 0 Active
US9583592B2 Methods of manufacturing semiconductor devices Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.