Reiji Niino
21Patents
6h-index
39Co-inventors
69Inventor score
Filing activity: Dec 18, 1991 → Jan 17, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5637153A | Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus | Chemistry; Metallurgy | 298 | Expired |
| US5252133A | Vertically oriented CVD apparatus including gas inlet tube having gas injection holes | Chemistry; Metallurgy | 285 | Expired |
| US8778815B2 | Film forming method | Emerging Cross-Sectional Technologies | 69 | Active |
| US5316472A | Vertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatus | Chemistry; Metallurgy | 35 | Expired |
| US5380370A | Method of cleaning reaction tube | Chemistry; Metallurgy | 33 | Expired |
| US5500388A | Heat treatment process for wafers | Electricity | 15 | Expired |
| US7989354B2 | Patterning method | Electricity | 6 | Active |
| US8168375B2 | Patterning method | Electricity | 5 | Active |
| US10446438B2 | Method of manufacturing semiconductor device | Electricity | 2 | Active |
| US8383522B2 | Micro pattern forming method | Electricity | 1 | Active |
| US10960435B2 | Film forming apparatus, film forming method, and storage medium | Electricity | 1 | Active |
| US7754622B2 | Patterning method utilizing SiBN and photolithography | Electricity | 1 | Active |
| US10790135B2 | Method of manufacturing semiconductor device | Electricity | 0 | Active |
| US11136668B2 | Film-forming apparatus and film-forming method | Electricity | 0 | Active |
| US11056349B2 | Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus | Electricity | 0 | Active |
| US10748782B2 | Method of manufacturing semiconductor device | Electricity | 0 | Active |
| US10490405B2 | Semiconductor device manufacturing method, substrate processing apparatus and vacuum processing apparatus | Electricity | 0 | Active |
| US9162252B2 | Film forming method | Electricity | 0 | Active |
| US10629448B2 | Method of manufacturing semiconductor device and vacuum processing apparatus | Electricity | 0 | Active |
| US10755971B2 | Method of manufacturing semiconductor device | Electricity | 0 | Active |
| US10593556B2 | Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.