Sadayoshi Horii
28Patents
5h-index
32Co-inventors
69Inventor score
Filing activity: Feb 28, 2003 → Dec 1, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7648578B1 | Substrate processing apparatus, and method for manufacturing semiconductor device | Electricity | 14 | Expired |
| US6787481B2 | Method for manufacturing semiconductor device | Electricity | 14 | Expired |
| US8026159B2 | Method of manufacturing semiconductor device and substrate processing apparatus | Electricity | 12 | Active |
| US8420552B2 | Method of manufacturing a semiconductor device | Electricity | 6 | Active |
| US6825126B2 | Manufacturing method of semiconductor device and substrate processing apparatus | Chemistry; Metallurgy | 6 | Expired |
| US7968437B2 | Semiconductor device manufacturing method and substrate processing apparatus | Electricity | 5 | Active |
| US8404603B2 | Method of manufacturing semiconductor device and substrate processing system | Electricity | 4 | Active |
| US8415237B2 | Method of manufacturing semiconductor device and substrate processing apparatus | Electricity | 3 | Active |
| US11476112B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 3 | Active |
| US7524766B2 | Method for manufacturing semiconductor device and substrate processing apparatus | Electricity | 3 | Expired |
| US9472637B2 | Semiconductor device having electrode made of high work function material and method of manufacturing the same | Electricity | 3 | Active |
| US8435905B2 | Manufacturing method of semiconductor device, and substrate processing apparatus | Electricity | 3 | Active |
| US7579276B2 | Substrate processing apparatus and method of manufacturing semiconductor device | Chemistry; Metallurgy | 2 | Expired |
| US9437704B2 | Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same | Electricity | 2 | Active |
| US8580671B2 | Method of manufacturing semiconductor device and substrate processing apparatus | Electricity | 1 | Active |
| US11869764B2 | Substrate processing apparatus, substrate processing method and non-transitory computer-readable recording medium | Emerging Cross-Sectional Technologies | 1 | Active |
| US8728935B2 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Electricity | 1 | Active |
| US10604839B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate | Electricity | 1 | Active |
| US8741731B2 | Method of manufacturing a semiconductor device | Electricity | 1 | Active |
| US8685866B2 | Method of manufacturing semiconductor device and substrate processing apparatus | Electricity | 1 | Active |
| US7531467B2 | Manufacturing method of semiconductor device and substrate processing apparatus | Electricity | 1 | Expired |
| US12087598B2 | Substrate processing apparatus | Electricity | 1 | Active |
| US11168396B2 | Method of manufacturing semiconductor device and recording medium | Electricity | 0 | Active |
| US7723245B2 | Method for manufacturing semiconductor device, and substrate processing apparatus | Electricity | 0 | Active |
| US8193083B2 | Method of manufacturing semiconductor device and substrate processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.