Inventor · Somalomo, CM

Seiro Miyoshi

15Patents

4h-index

36Co-inventors

60Inventor score

Filing activity: Dec 8, 1997 → Dec 19, 2016

Most-cited inventions

Patent	Title	Area	Cited by	Status
US6025117A	Method of forming a pattern using polysilane	Physics	348	Expired
US6270948A	Method of forming pattern	Electricity	31	Expired
US6576375B1	Photomask	Physics	13	Expired
US7779777B2	Substrate processing apparatus and method	Electricity	6	Active
US8759177B2	Pattern forming method	Electricity	3	Active
US8178366B2	Pattern forming method, manufacturing method of semiconductor device, and template manufacturing method	Emerging Cross-Sectional Technologies	2	Active
US9202763B2	Defect pattern evaluation method, defect pattern evaluation apparatus, and recording media	Electricity	1	Active
US8423926B2	Acceptance determining method of blank for EUV mask and manufacturing method of EUV mask	Physics	1	Active
US7985685B2	Method of manufacturing semiconductor device	Electricity	0	Active
US8984454B2	Pattern data generation method, pattern verification method, and optical image calculation method	Physics	0	Active
US7973907B2	Method for treating substrate, method for conveying substrate, and apparatus for conveying substrate	Physics	0	Active
US9547743B2	Manufacturing method for a semiconductor device, pattern generating method and nontransitory computer readable medium storing a pattern generating program	Physics	0	Active
US10176290B2	Manufacturing method for a semiconductor device, pattern generating method and nontransitory computer readable medium storing a pattern generating program	Physics	0	Active
US9070559B2	Pattern forming method and method of manufacturing semiconductor device	Electricity	0	Active
US9576100B2	Pattern data generation method, pattern verification method, and optical image calculation method	Physics	0	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.