Inventor · Danbury, CT, US

Steven Lippy

14Patents

4h-index

24Co-inventors

56Inventor score

Filing activity: Mar 13, 2006 → Apr 14, 2021

Most-cited inventions

Patent	Title	Area	Cited by	Status
US9063431B2	Aqueous cleaner for the removal of post-etch residues	Chemistry; Metallurgy	17	Active
US9831088B2	Composition and process for selectively etching metal nitrides	Electricity	9	Active
US10138117B2	Aqueous formulations for removing metal hard mask and post-etch residue with Cu/W compatibility	Electricity	8	Active
US9546321B2	Compositions and methods for selectively etching titanium nitride	Electricity	4	Active
US10472567B2	Compositions and methods for selectively etching titanium nitride	Electricity	3	Active
US10428271B2	Compositions and methods for selectively etching titanium nitride	Electricity	3	Active
US10392560B2	Compositions and methods for selectively etching titanium nitride	Electricity	2	Active
US8044009B2	Compositions for cleaning ion implanted photoresist in front end of line applications	Chemistry; Metallurgy	2	Active
US10920141B2	Compositions and methods for selectively etching titanium nitride	Electricity	1	Active
US11978622B2	Aqueous and semi-aqueous cleaners for the removal of post-etch residues with tungsten and cobalt compatibility	Chemistry; Metallurgy	0	Active
US10460954B2	Anti-reflective coating cleaning and post-etch residue removal composition having metal, dielectric and nitride compatibility	Chemistry; Metallurgy	0	Active
US11492709B2	Method and composition for etching molybdenum	Electricity	0	Active
US11346008B2	Ruthenium etching composition and method	Chemistry; Metallurgy	0	Active
US11476158B2	Cobalt deposition selectivity on copper and dielectrics	Electricity	0	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.