Inventor · Shirakawa, JP

Tadahiro Kato

35Patents
12h-index
37Co-inventors
81Inventor score

Filing activity: May 12, 1987 → Mar 18, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US5942445A Method of manufacturing semiconductor wafers Electricity 97 Expired
US5800725A Method of manufacturing semiconductor wafers Electricity 49 Expired
US5679212A Method for production of silicon wafer and apparatus therefor Performing Operations; Transporting 40 Expired
US5951374A Method of polishing semiconductor wafers Performing Operations; Transporting 33 Expired
US5494862A Method of making semiconductor wafers Emerging Cross-Sectional Technologies 32 Expired
US6726525B1 Method and device for grinding double sides of thin disk work Performing Operations; Transporting 31 Expired
US6491836B1 Semiconductor wafer and production method therefor Electricity 25 Expired
US8037878B2 Method for slicing workpiece by using wire saw and wire saw Performing Operations; Transporting 18 Active
US4759961A Coating method with crosslinked coatings from two coat-one bake systems Chemistry; Metallurgy 17 Expired
US6050880A Surface grinding device and method of surface grinding a thin-plate workpiece Performing Operations; Transporting 15 Expired
US6652358B1 Double-sided simultaneous grinding method, double-sided simultaneous grinding machine, double-sided simultaneous lapping method, and double-sided simultaneous lapping machine Performing Operations; Transporting 15 Expired
US5447890A Method for production of wafer Emerging Cross-Sectional Technologies 14 Expired
US5474644A Method and apparatus for high-flatness etching of wafer Electricity 12 Expired
US7507146B2 Method for producing semiconductor wafer and semiconductor wafer Electricity 11 Expired
US6444317B1 Decorative film for use in plastics molding, process for preparing the same and injection-molded part by use of the same Emerging Cross-Sectional Technologies 10 Expired
US6284658A Manufacturing process for semiconductor wafer Electricity 8 Expired
US6077149A Method and apparatus for surface-grinding of workpiece Performing Operations; Transporting 8 Expired
US6660337B2 Decorative film for use in plastics molding, process for preparing the same and injection-molded part by use of the same Emerging Cross-Sectional Technologies 8 Expired
US6239039A Semiconductor wafers processing method and semiconductor wafers produced by the same Emerging Cross-Sectional Technologies 8 Expired
US6883342B2 Multiform gas heat pump type air conditioning system Mechanical Engineering; Lighting; Heating 5 Expired
US6787797B2 Semiconductor wafer and device for semiconductor device manufacturing process Electricity 5 Expired
US6220928A Surface grinding method and apparatus for thin plate work Performing Operations; Transporting 5 Expired
US7332437B2 Method for processing semiconductor wafer and semiconductor wafer Electricity 5 Expired
US6346485B1 Semiconductor wafer processing method and semiconductor wafers produced by the same Emerging Cross-Sectional Technologies 4 Expired
US6432837B1 Semiconductor wafer processing method and semiconductor wafers produced by the same Emerging Cross-Sectional Technologies 4 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.