William Robert Entley
17Patents
3h-index
22Co-inventors
56Inventor score
Filing activity: Nov 1, 2001 → Jun 18, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9449793B2 | Systems, methods and apparatus for choked flow element extraction | Electricity | 450 | Active |
| US6872323B1 | In situ plasma process to remove fluorine residues from the interior surfaces of a CVD reactor | Emerging Cross-Sectional Technologies | 58 | Expired |
| US7479191B1 | Method for endpointing CVD chamber cleans following ultra low-k film treatments | Chemistry; Metallurgy | 11 | Active |
| US10106890B2 | Compositions and methods using same for deposition of silicon-containing film | Electricity | 2 | Active |
| US10249489B2 | Use of silyl bridged alkyl compounds for dense OSG films | Electricity | 2 | Active |
| US8999104B2 | Systems, methods and apparatus for separate plasma source control | Electricity | 1 | Active |
| US7914603B2 | Particle trap for a plasma source | Emerging Cross-Sectional Technologies | 1 | Active |
| US10283325B2 | Distributed multi-zone plasma source systems, methods and apparatus | Electricity | 0 | Active |
| US9922818B2 | Alkyl-alkoxysilacyclic compounds | Electricity | 0 | Active |
| US11884689B2 | Alkoxysilacyclic or acyloxysilacyclic compounds and methods for depositing films using same | Electricity | 0 | Active |
| US9967965B2 | Distributed, concentric multi-zone plasma source systems, methods and apparatus | Electricity | 0 | Active |
| US11158498B2 | Silicon compounds and methods for depositing films using same | Performing Operations; Transporting | 0 | Active |
| US12049695B2 | Compositions and methods using same for deposition of silicon-containing film | Electricity | 0 | Active |
| US11164739B2 | Use of silicon structure former with organic substituted hardening additive compounds for dense OSG films | Electricity | 0 | Active |
| US10424460B2 | Systems, methods and apparatus for choked flow element extraction | Electricity | 0 | Active |
| US9155181B2 | Distributed multi-zone plasma source systems, methods and apparatus | Electricity | 0 | Active |
| US10395920B2 | Alkyl-alkoxysilacyclic compounds | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.