Patent assignee · KR · COMPANY

KC TECHNOLOGY CO., LTD.

23Patents
16Active
23Granted
46Portfolio score

Filing activity: Mar 3, 1999 → Mar 17, 2022 · 7 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US7442112B2 Nozzle for spraying sublimable solid particles entrained in gas for cleaning surface Performing Operations; Transporting 52 Active
US6347380B1 System for adjusting clock rate to avoid audio data overflow and underrun Physics 21 Expired
US7762869B2 Nozzle for spraying sublimable solid particles entrained in gas for cleaning surface Performing Operations; Transporting 11 Active
US8968476B2 Atomic layer deposition apparatus Electricity 6 Active
US8939817B2 Membrane assembly and carrier head having the membrane assembly Performing Operations; Transporting 6 Active
US8662956B2 Conditioner of chemical mechanical polishing apparatus Performing Operations; Transporting 6 Active
US7013660B2 System for forming aerosols and cooling device incorporated therein Mechanical Engineering; Lighting; Heating 5 Expired
US7270136B2 Apparatus for cleaning the edges of wafers Emerging Cross-Sectional Technologies 5 Expired
US7470295B2 Polishing slurry, method of producing same, and method of polishing substrate Electricity 4 Expired
US8062547B2 CMP slurry, preparation method thereof and method of polishing substrate using the same Electricity 3 Active
US7892069B2 Loading device of chemical mechanical polishing equipment for semiconductor wafers Performing Operations; Transporting 3 Active
US7364600B2 Slurry for CMP and method of polishing substrate using same Electricity 2 Expired
US9704729B2 Substrate cleaning apparatus and method and brush assembly used therein Performing Operations; Transporting 2 Active
US8882563B2 Chemical mechanical polishing system Performing Operations; Transporting 2 Active
US7674156B2 Cleaning device for chemical mechanical polishing equipment Performing Operations; Transporting 1 Active
US6978625B1 System for forming aerosols and cooling device incorporated therein Mechanical Engineering; Lighting; Heating 1 Expired
US7008306B2 Nozzle for injecting sublimable solid particles entrained in gas for cleaning a surface Emerging Cross-Sectional Technologies 0 Expired
US10435587B2 Polishing compositions and methods of manufacturing semiconductor devices using the same Electricity 0 Active
US9991127B2 Method of fabricating integrated circuit device by using slurry composition Electricity 0 Active
US8491682B2 Abrasive particles, method of manufacturing the abrasive particles, and method of manufacturing chemical mechanical polishing slurry Chemistry; Metallurgy 0 Active
US10428242B2 Slurry composition for chemical mechanical polishing Chemistry; Metallurgy 0 Active
USD1034261S1 Image magnifying and polarizing lens assembly for measuring device General 0 Active
US8361177B2 Polishing slurry, method of producing same, and method of polishing substrate Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.