Alan Ouye
27Patents
12h-index
34Co-inventors
81Inventor score
Filing activity: Aug 12, 1998 → Jul 13, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6916398B2 | Gas delivery apparatus and method for atomic layer deposition | Electricity | 560 | Expired |
| US6905541B2 | Method and apparatus of generating PDMAT precursor | Emerging Cross-Sectional Technologies | 85 | Expired |
| US6955211B2 | Method and apparatus for gas temperature control in a semiconductor processing system | Electricity | 54 | Expired |
| US7780785B2 | Gas delivery apparatus for atomic layer deposition | Emerging Cross-Sectional Technologies | 51 | Expired |
| US7270709B2 | Method and apparatus of generating PDMAT precursor | Emerging Cross-Sectional Technologies | 36 | Expired |
| US7699023B2 | Gas delivery apparatus for atomic layer deposition | Emerging Cross-Sectional Technologies | 23 | Active |
| US6228208A | Plasma density and etch rate enhancing semiconductor processing chamber | Electricity | 18 | Expired |
| US8668776B2 | Gas delivery apparatus and method for atomic layer deposition | Electricity | 18 | Active |
| US7909961B2 | Method and apparatus for photomask plasma etching | Electricity | 17 | Active |
| US7524374B2 | Method and apparatus for generating a precursor for a semiconductor processing system | Emerging Cross-Sectional Technologies | 16 | Expired |
| US7775508B2 | Ampoule for liquid draw and vapor draw with a continuous level sensor | Chemistry; Metallurgy | 15 | Active |
| US7597758B2 | Chemical precursor ampoule for vapor deposition processes | Emerging Cross-Sectional Technologies | 12 | Active |
| US7780788B2 | Gas delivery apparatus for atomic layer deposition | Electricity | 11 | Active |
| US7943005B2 | Method and apparatus for photomask plasma etching | Electricity | 10 | Active |
| US9378930B2 | Inductively coupled plasma reactor having RF phase control and methods of use thereof | Electricity | 6 | Active |
| US7588736B2 | Apparatus and method for generating a chemical precursor | Emerging Cross-Sectional Technologies | 4 | Active |
| US9236284B2 | Cooled tape frame lift and low contact shadow ring for plasma heat isolation | Electricity | 4 | Active |
| US9165812B2 | Cooled tape frame lift and low contact shadow ring for plasma heat isolation | Electricity | 4 | Active |
| US9478455B1 | Thermal pyrolytic graphite shadow ring assembly for heat dissipation in plasma chamber | Electricity | 2 | Active |
| US9293304B2 | Plasma thermal shield for heat dissipation in plasma chamber | Electricity | 1 | Active |
| US8062422B2 | Method and apparatus for generating a precursor for a semiconductor processing system | Emerging Cross-Sectional Technologies | 1 | Active |
| US11721566B2 | Sensor assembly and methods of vapor monitoring in process chambers | Chemistry; Metallurgy | 0 | Active |
| US6598316B2 | Apparatus to reduce contaminants from semiconductor wafers | Electricity | 0 | Expired |
| US6406553B1 | Method to reduce contaminants from semiconductor wafers | Electricity | 0 | Expired |
| US11195756B2 | Proximity contact cover ring for plasma dicing | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.