Inventor · Cupertino, CA, US

Chi-I Lang

97Patents
19h-index
102Co-inventors
87Inventor score

Filing activity: Jun 15, 1998 → Jul 16, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US7915139B1 CVD flowable gap fill Electricity 775 Active
US6413583B1 Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound Electricity 641 Expired
US7582555B1 CVD flowable gap fill Electricity 563 Expired
US7888233B1 Flowable film dielectric gap fill process Electricity 543 Active
US7514375B1 Pulsed bias having high pulse frequency for filling gaps with dielectric material Electricity 530 Active
US8440259B2 Vapor based combinatorial processing Chemistry; Metallurgy 518 Active
US7211525B1 Hydrogen treatment enhanced gap fill Electricity 498 Expired
US8821985B2 Method and apparatus for high-K gate performance improvement and combinatorial processing Performing Operations; Transporting 324 Active
US7524735B1 Flowable film dielectric gap fill process Electricity 124 Active
US7629198B2 Methods for forming nonvolatile memory elements with resistive-switching metal oxides Electricity 98 Active
US7972897B2 Methods for forming resistive switching memory elements Electricity 69 Active
US7435684B1 Resolving of fluorine loading effect in the vacuum chamber Electricity 61 Active
US6709715B1 Plasma enhanced chemical vapor deposition of copolymer of parylene N and comonomers with various double bonds Electricity 47 Expired
US6086952A Chemical vapor deposition of a copolymer of p-xylylene and a multivinyl silicon/oxygen comonomer Performing Operations; Transporting 46 Expired
US6486082B1 CVD plasma assisted lower dielectric constant sicoh film Emerging Cross-Sectional Technologies 39 Expired
US8580697B1 CVD flowable gap fill Electricity 34 Active
US6107184A Nano-porous copolymer films having low dielectric constants Emerging Cross-Sectional Technologies 33 Expired
US8481403B1 Flowable film dielectric gap fill process Electricity 24 Active
US7678607B2 Methods for forming resistive switching memory elements Electricity 23 Active
US7902064B1 Method of forming a layer to enhance ALD nucleation on a substrate Electricity 19 Active
US7381451B1 Strain engineering—HDP thin film with tensile stress for FEOL and other applications Electricity 19 Expired
US8809161B2 Flowable film dielectric gap fill process Electricity 19 Active
US7482245B1 Stress profile modulation in STI gap fill Electricity 18 Active
US7727906B1 H2-based plasma treatment to eliminate within-batch and batch-to-batch etch drift Electricity 16 Active
US7704789B2 Methods for forming resistive switching memory elements Electricity 16 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.