Inventor · Palo Alto, CA, US

David Bang

17Patents
9h-index
18Co-inventors
65Inventor score

Filing activity: Sep 30, 1994 → May 21, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US5949143A Semiconductor interconnect structure with air gap for reducing intralayer capacitance in metal layers in damascene metalization process Electricity 68 Expired
US6268277A Method of producing air gap for reducing intralayer capacitance in metal layers in damascene metalization process and product resulting therefrom Electricity 33 Expired
US5643428A Multiple tier collimator system for enhanced step coverage and uniformity Electricity 32 Expired
US6047243A Method for quantifying ultra-thin dielectric reliability: time dependent dielectric wear-out Physics 22 Expired
US6127193A Test structure used to measure metal bottom coverage in trenches and vias/contacts and method for creating the test structure Electricity 22 Expired
US6169039A Electron bean curing of low-k dielectrics in integrated circuits Emerging Cross-Sectional Technologies 20 Expired
US5953625A Air voids underneath metal lines to reduce parasitic capacitance Electricity 20 Expired
US5580428A PVD sputter system having nonplanar target configuration and methods for constructing same Chemistry; Metallurgy 15 Expired
US5556525A PVD sputter system having nonplanar target configuration and methods for operating same Chemistry; Metallurgy 12 Expired
US9159910B2 One-mask MTJ integration for STT MRAM Electricity 8 Active
US8933567B2 Electrically broken, but mechanically continuous die seal for integrated circuits Electricity 6 Active
US8207569B2 Intertwined finger capacitors Emerging Cross-Sectional Technologies 5 Active
US8483997B2 Predictive modeling of contact and via modules for advanced on-chip interconnect technology Physics 3 Active
US6274915A Method of improving MOS device performance by controlling degree of depletion in the gate electrode Electricity 3 Expired
US7675372B2 Circuit simulator parameter extraction using a configurable ring oscillator Physics 3 Active
US6380556B1 Test structure used to measure metal bottom coverage in trenches and vias/contacts and method for creating the test structure Electricity 2 Expired
US7973541B2 Method and apparatus for estimating resistance and capacitance of metal interconnects Physics 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.