Inventor · Suwon-si, KR

Ju-Seon Goo

17Patents
8h-index
26Co-inventors
68Inventor score

Filing activity: Jul 10, 1997 → Apr 13, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US6566229B2 Method of forming an insulating layer in a trench isolation type semiconductor device Electricity 55 Expired
US5989983A Method of fabricating and curing spin-on-glass layers by electron beam irradiation Electricity 41 Expired
US6057251A Method for forming interlevel dielectric layer in semiconductor device using electron beams Electricity 33 Expired
US6635586B2 Method of forming a spin-on-glass insulation layer Electricity 21 Expired
US6489252B2 Method of forming a spin-on-glass insulation layer Electricity 14 Expired
US7674685B2 Semiconductor device isolation structures and methods of fabricating such structures Electricity 12 Active
US6117785A Multiple etch methods for forming contact holes in microelectronic devices including SOG layers and capping layers thereon Electricity 12 Expired
US7192891B2 Method for forming a silicon oxide layer using spin-on glass Electricity 9 Expired
US6368906B1 Method of planarization using selecting curing of SOG layer Electricity 8 Expired
US7332409B2 Methods of forming trench isolation layers using high density plasma chemical vapor deposition Electricity 6 Expired
US7517817B2 Method for forming a silicon oxide layer using spin-on glass Electricity 5 Active
US7842569B2 Flash memory device and method of fabricating the same Electricity 3 Active
US8043914B2 Methods of fabricating flash memory devices comprising forming a silicide on exposed upper and side surfaces of a control gate Electricity 3 Active
US7358190B2 Methods of filling gaps by deposition on materials having different deposition rates Electricity 3 Expired
US6645879B2 Method of forming a silicon oxide layer of a semiconductor device and method of forming a wiring having the same Emerging Cross-Sectional Technologies 2 Expired
US8492223B2 Methods of manufacturing flash memory devices by selective removal of nitrogen atoms Electricity 0 Active
US7781304B2 Semiconductor device having trench isolation region and methods of fabricating the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.